PZT Thick Films Deposited by Improved Hydrothermal Method for Thickness Mode Ultrasonic Transducer
Published online by Cambridge University Press: 01 February 2011
The purpose of this study was to improve deposition rate of the hydrothermal method for lead zirconate titanate (PZT) thick film on titanium substrate. We developed a high-speed rotaion substrate holder at a tangential velocity of about 0.8m/s in autoclave. A titanium substrate was fixed by the holder on the surface of a stirring bar. For the film deposition, powder of TiO2 was used instead of the liquid TiCl4. The deposition rate on titanium substrate was improved up to 7μm/24h. Piezoelectric constant d31 of the hydrothermal PZT film was -2.6 × 1011 V/m. This result was lower than that of PZT ceramics. However, this hydrothermal method obtained thick film and this film was confirmed to be polycrystalline PZT analyses of XRD and SEM. In addition, performance of thickness mode vibration of hydrothermal PZT 50μm thick film was investigated by radiating in water. The phase velocity of dilatational wave of the thickness mode vibration of the hydrothermal PZT film was 1800m/s and the electromechanical coupling factor was 47%.
- Research Article
- MRS Online Proceedings Library (OPL) , Volume 784: Symposium C – Ferroelectric Thin Films XII , 2003 , C11.27
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