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Pulsed Laser Deposition of High Tc Superconducting thin Films: Present and Future

Published online by Cambridge University Press:  16 February 2011

X. D. Wu
Affiliation:
ERDC, Los Alamos National Laboratory, Los Alamos, NM 87545
T. Venkatesan
Affiliation:
Bellcore, Red Bank, NJ 07701
A. Inam
Affiliation:
Physics Department, Rutgers University, Piscataway, NJ 08854
X. X. Xi
Affiliation:
Physics Department, Rutgers University, Piscataway, NJ 08854
Q. Li
Affiliation:
Physics Department, Rutgers University, Piscataway, NJ 08854
W. L. McLean
Affiliation:
Physics Department, Rutgers University, Piscataway, NJ 08854
C. C. Chang
Affiliation:
Bellcore, Red Bank, NJ 07701
D. M. Hwang
Affiliation:
Bellcore, Red Bank, NJ 07701
R. Ramesh
Affiliation:
Bellcore, Red Bank, NJ 07701
L. Nazar
Affiliation:
Bellcore, Red Bank, NJ 07701
B. Wilkens
Affiliation:
Bellcore, Red Bank, NJ 07701
S. A. Schwarz
Affiliation:
Bellcore, Red Bank, NJ 07701
R. T. Ravi
Affiliation:
Bellcore, Red Bank, NJ 07701
J. A. Martinez
Affiliation:
Departamento de Fisica, Universidad Nacional de La Plata (UNLP), Argentina
P. England
Affiliation:
Bellcore, Red Bank, NJ 07701
J. M. Tarascon
Affiliation:
Bellcore, Red Bank, NJ 07701
R. E. Muenchausen
Affiliation:
ERDC, Los Alamos National Laboratory, Los Alamos, NM 87545
S. Foltyn
Affiliation:
ERDC, Los Alamos National Laboratory, Los Alamos, NM 87545
R. C. Estler
Affiliation:
ERDC, Los Alamos National Laboratory, Los Alamos, NM 87545
R. C. Dye
Affiliation:
ERDC, Los Alamos National Laboratory, Los Alamos, NM 87545
A. R. Garcia
Affiliation:
ERDC, Los Alamos National Laboratory, Los Alamos, NM 87545
N. S. Nogar
Affiliation:
ERDC, Los Alamos National Laboratory, Los Alamos, NM 87545
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Abstract

Pulsed laser deposition (PLD) has been widely used for deposition of high Tc superconducting thin films, and is recognized as one of the best physical vapor techniques for the preparation of these films. The most important advantage of this technique is stoichiometric deposition; films can be made with the same composition as the target. Utilizing PLD, not only thin films but also multilayers and superlattices of high Tc superconductors have been fabricated. In this paper, the performance of the technique will be reviewed, and speculations regarding the future would be made.

Type
Research Article
Copyright
Copyright © Materials Research Society 1990

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