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Preparations and Characterizations of Epitaxial SrBi2Ta2O9 Thin Films

Published online by Cambridge University Press:  21 March 2011

Keisuke Saito
Affiliation:
Application Laboratory, Philips Japan Ltd. 7-35-1 Sagamiono, Sagamihara 228-0803, Japan
Masatoshi Mitsuya
Affiliation:
Department of Innovative and Engineered Materials, Interdisciplinary Graduate School, Tokyo Institute of Technology 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8502, Japan
Toshimasa Suzuki
Affiliation:
Taiyo Yuden Co., Ltd., 5607-2 Nakamuroda, Haruna-machi, Gumma 370-3347, Japan
Yuji Nishi
Affiliation:
Taiyo Yuden Co., Ltd., 5607-2 Nakamuroda, Haruna-machi, Gumma 370-3347, Japan
Masayuki Fujimoto
Affiliation:
Taiyo Yuden Co., Ltd., 5607-2 Nakamuroda, Haruna-machi, Gumma 370-3347, Japan
Masanori Nukaga
Affiliation:
Department of Innovative and Engineered Materials, Interdisciplinary Graduate School, Tokyo Institute of Technology 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8502, Japan
Isao Yamaji
Affiliation:
Application Laboratory, Philips Japan Ltd. 7-35-1 Sagamiono, Sagamihara 228-0803, Japan
Takao Akai
Affiliation:
Application Laboratory, Philips Japan Ltd. 7-35-1 Sagamiono, Sagamihara 228-0803, Japan
Hiroshi Funakubo
Affiliation:
Department of Innovative and Engineered Materials, Interdisciplinary Graduate School, Tokyo Institute of Technology 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8502, Japan
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Abstract

Epitaxial (001)-, (116)- and pseudo (103)-oriented Sr0.35Bi2.2Ta2O9 (SBT (0.35/2.2/2.0)) films were successfully grown on (001), (110) and (111) SrTiO3 substrates, respectively. High-resolution X-ray diffraction reciprocal space mapping (HRXRD-RSM) measurements and pole figure measurements clearly indicated that the (116)-oriented SBT (0.35/2.2/2.0) film consisted of two growth domains those c-axis are separated 180° apart in in-plane and pseudo (103)-oriented SBT film consisted of three growth domains those c-axis are separated 120° apart in in-plane. Moreover, lattice parameter measurements indicated that SBT films grew in fully relaxed state.

Type
Research Article
Copyright
Copyright © Materials Research Society 2001

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References

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