Hostname: page-component-7bb8b95d7b-5mhkq Total loading time: 0 Render date: 2024-10-05T16:53:09.967Z Has data issue: false hasContentIssue false

Physics of Solid-Phase Epitaxy of Hydrogenated Amorphous Silicon for Thin Film Si Photovoltaics

Published online by Cambridge University Press:  01 February 2011

Paul Stradins
Affiliation:
pauls_stradins@nrel.gov, National Renewable Energy Laboratory, Senior Scientist II, 1617 Cole Blvd., Golden, CO, United States
Yanfa Yan
Affiliation:
yanfa_yan@nrel.com, National Renewable Energy Laboratory, 1617 Cole Blvd., Golden, CO, 80401, United States
Robert Reedy
Affiliation:
bob_reedy@nrel.gov, National Renewable Energy Laboratory, 1617 Cole Blvd., Golden, CO, 80401, United States
David L. Young
Affiliation:
david_young@nrel.gov, National Renewable Energy Laboratory, 1617 Cole Blvd., Golden, CO, 80401, United States
Charles W Teplin
Affiliation:
chaz_teplin@nrel.gov, National Renewable Energy Laboratory, 1617 Cole Blvd., Golden, CO, 80401, United States
Eugene Iwaniczko
Affiliation:
eugene_iwaniczko@nrel.gov, National Renewable Energy Laboratory, 1617 Cole Blvd., Golden, CO, 80401, United States
Yueqin Xu
Affiliation:
yueqin_xu@nrel.gov, National Renewable Energy Laboratory, 1617 Cole Blvd., Golden, CO, 80401, United States
Kim Jones
Affiliation:
kim_jones@nrel.gov, National Renewable Energy Laboratory, 1617 Cole Blvd., Golden, CO, 80401, United States
Glenn Teeter
Affiliation:
glenn_teeter@nrel.gov, National Renewable Energy Laboratory, 1617 Cole Blvd., Golden, CO, 80401, United States
A. Harv Mahan
Affiliation:
harv_mahan@nrel.gov, National Renewable Energy Laboratory, 1617 Cole Blvd., Golden, CO, 80401, United States
Howard M. Branz
Affiliation:
howard_branz@nrel.gov, National Renewable Energy Laboratory, 1617 Cole Blvd., Golden, CO, 80401, United States
Qi Wang
Affiliation:
qi_wang@nrel.gov, National Renewable Energy Laboratory, 1617 Cole Blvd., Golden, CO, 80401, United States
Get access

Abstract

Solid state crystallization of hydrogenated amorphous silicon (a-Si:H) prepared by hot-wire CVD is studied in solid phase epitaxy mode. By using a novel optical method combined with cross-sectional TEM and SIMS, a reduction of epitaxial growth speed is observed with increase in a-Si:H film thickness. Namely, in films thinner that 0.5 micron, solid phase epitaxy velocity depends linearly on film thickness. As the film thickness increases beyond 1 micron, the average velocity of solid phase epitaxy decreases considerably with respect to that in thinner films. In this regime, its velocity becomes also time-dependent: initial slow propagation of crystallization front gets considerably accelerated after the front has traveled above 400nm. SIMS thickness profiles of hydrogen shows considerably more residual hydrogen in thicker films after the start of solid phase epitaxy. In addition, prolonged pre-dehydrogenation at lower temperatures results in the increase in the average epitaxy speed in thicker films. These phenomena are likely related to delayed hydrogen outdiffusion in thicker films, which also leads to time-dependent speed of the solid-phase epitaxy front. We conclude that excess residual hydrogen reduces the rate of solid-phase crystalline growth.

Type
Research Article
Copyright
Copyright © Materials Research Society 2006

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Boyce, J. B., Fulks, R. T., Ho, J. et al. , Thin Solid Films 383, (2001) 137.Google Scholar
2. Green, M. A., Basore, P. A., Chang, N. et al. , Sol. Energy 77, (2004) 857.Google Scholar
3. Spinella, C., Lombardo, S. and Priolo, F., J. Appl. Phys. 84, (1998) 5383, and references therein.Google Scholar
4. Fujiwara, H., Koh, J., Lee, Y. et al. , Mater. Res. Soc. Symp. Proc. 507, (1998) 939.Google Scholar
5. Roth, J. A., Olson, G. L., Jacobson, D. C. et al. , Appl. Phys. Lett. 57, (1990) 1340.Google Scholar
6. Oberlin, J. C., Chami, A. C., Ligeon, E. et al. , Nucl. Instrum. Methods Phys. Res. Sect. B-Beam Interact. Mater. Atoms 19–2, (1987) 462.Google Scholar
7. Young, D. L., Stradins, P., Roy, B. et al. , this volume (2005).Google Scholar
8. Mahan, A. H., Roy, B., Reedy, R. C. et al. , J. Appl. Phys. 99, (2006) 023597.Google Scholar
9. Teplin, C. W., Wang, Q., Iwaniczko, E. et al. , J. Cryst. Growth 287, (2006) 414.Google Scholar