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Optimization of Ion Assist Beam Deposition of Magnesium Oxide Template Films During Initial Nucleation and Growth

Published online by Cambridge University Press:  01 February 2011

James Groves
Affiliation:
jgroves@stanford.edu, Stanford University, Materials Science, 476 Lomita Mall, Stanford, California, 94305, United States, 505 470-3470
Robert Hammond
Affiliation:
rhammond@stanford.edu, Stanford University, GLAM, 476 Lomita Mall, Stanford, California, 94305, United States, 650 723-0169
Vladimir Matias
Affiliation:
vlado@lanl.gov, Los Alamos National Laboratory, Superconductivity Technology Center, Mail Stop T004, Los Alamos, New Mexico, 87545, United States
Liliana Stan
Affiliation:
lilianas@lanl.gov, Los Alamos National Laboratory, Superconductivity Technology Center, Mail Stop T004, Los Alamos, New Mexico, 87545, United States
Raymond F DePaula
Affiliation:
rdepaula@lanl.gov, Los Alamos National Laboratory, Superconductivity Technology Center, 87545, New Mexico, United States
Bruce M Clemens
Affiliation:
bmc@stanford.edu, Stanford University, Materials Science and Engineering, 94305, California, United States
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Abstract

Recent efforts in investigating the mechanism of ion beam assisted deposition (IBAD) of biaxially textured thin films of magnesium oxide (MgO) template layers have shown that the texture develops suddenly during the initial 2 nm of deposition. To help understand and tune the behavior during this initial stage, we pre-deposited thin layers of MgO with no ion assist prior to IBAD growth of MgO. We found that biaxial texture develops for pre-deposited thicknesses < 2 nm, and that the thinnest layer tested, at 1 nm, resulted in the best qualitative RHEED image, indicative of good biaxial texture development. The texture developed during IBAD growth on the 1.5 nm pre-deposited layer is slightly worse and IBAD growth on the 2 nm pre-deposited layer produces a fiber texture. Application of these layers on an Al2O3 starting surface, which has been shown to impede texture development, improves the overall quality of the IBAD MgO and has some of the characteristics of a biaxially texture RHEED pattern. It is suggested that the use of thin (<2 nm) pre-deposited layers may eliminate the need for bed layers like Si3N4 and Y2O3 that are currently thought to be required for proper biaxial texture development in IBAD MgO.

Type
Research Article
Copyright
Copyright © Materials Research Society 2010

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