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Observation of Semiconductor Superstructures With Backscattered Electrons in a Scanning Electron Microscope

Published online by Cambridge University Press:  21 February 2011

A. Bosacchi
Affiliation:
Istituto MASPEC del CNR, via Chiavari 18A, 1-43100 Parma, Italy
S. Franchi
Affiliation:
Istituto MASPEC del CNR, via Chiavari 18A, 1-43100 Parma, Italy
D. Govoni
Affiliation:
Istituto LAMEL del CNR, via P. Gobetti 101,1-40129 Bologna, Italy
G. Mattei
Affiliation:
Istituto LAMEL del CNR, via P. Gobetti 101,1-40129 Bologna, Italy
P.G. Merli
Affiliation:
Istituto LAMEL del CNR, via P. Gobetti 101,1-40129 Bologna, Italy
A. Migliori
Affiliation:
Istituto LAMEL del CNR, via P. Gobetti 101,1-40129 Bologna, Italy
M. Nacucchi
Affiliation:
CNRSM SCpA, S.S. 7 Km 714.3, 72100 Brindisi, Italy
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Abstract

Observations of semiconductor superstructures with backscattered electrons in a scanning electron microscope have been used to revisit the concept of resolution of the backscattering imaging mode. It will be shown that the generation volume doesn't represent in itself a limit to the resolution, which depends only on the beam size and the signal to noise ratio.

Type
Research Article
Copyright
Copyright © Materials Research Society 1995

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References

1 Ogura, K. and Kersker, M.M., in: Proc. 46th Annual Meeting of the Electron Microscopy Society of America, (San Francisco Press, San Francisco, 1988) p.204 Google Scholar
2 Ogura, K., Ono, A., Franchi, S., Merli, P.G. and Migliori, A., Proc. of XII th Int. Cong. Elect. Microsc, Vol. 1 (San Francisco Press, San Francisco, 1990) p.404 Google Scholar
3 Franchi, S., Merli, P.G., Migliori, A., Ogura, K. and Ono, A., Proc. of XII th Int. Cong. Elect. Microsc, Vol. 1 (San Francisco Press, San Francisco, 1990) p.380 Google Scholar
4 Reimer, L., Scanning Electron Microscopy, Springer Verlag, 1985 CrossRefGoogle Scholar
5 Merli, P.G. and Nacucchi, M., Ultramicroscopy, 50 (1993) 83.CrossRefGoogle Scholar

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