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Novel Synthesis of Metal Nanowhiskers: High-Temperature Glancing Angle Deposition

Published online by Cambridge University Press:  01 February 2011

Motofumi Suzuki
Affiliation:
m-snki@mbox.kudpc.kyoto-u.ac.jp, Kyoto University, Department of Micro Engineering, Yoshida, Sakyo, Kyoto, 606-8501, Japan, +81-75-753-5196, +81-75-753-5196
Kenji Hamachi
Affiliation:
onionring_kenji@ybb.ne.jp, Kyoto University, Department of Micro Engineering, Yoshida, Sakyo, Kyoyo, 606-8501, Japan
Koji Nagai
Affiliation:
nagai.koji@t1025.mbox.media.kyoto-u.ac.jpp, Kyoto University, Department of Micro Engineering, Yoshida, Sakyo, Kyoyo, 606-8501, Japan
Ryo Kita
Affiliation:
vtt205-rk@t04.mbox.media.kyoto-u.ac.jp, Kyoto University, Department of Micro Engineering, Yoshida, Sakyo, Kyoyo, 606-8501, Japan
Kaoru Nakajima
Affiliation:
Nakajima.Kaoru@z05.mbox.media.kyoto-u.ac.jp, Kyoto University, Department of Micro Engineering, Yoshida, Sakyo, Kyoyo, 606-8501, Japan
Kenji Kimura
Affiliation:
kimura@t02.mbox.media.kyoto-u.ac.jp, Kyoto University, Department of Micro Engineering, Yoshida, Sakyo, Kyoyo, 606-8501, Japan
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Abstract

We demonstrate high temperature glancing deposition (HT-GLAD) of metals on the heated substrate. It has been found that Al, Ag, Au, Fe nano-whiskers grow on the substrate of Si, SiO2, and glass substrates. The robustness in the selection of materials suggests that the HT-GLAD is a universal method to grow nano-whiskers of various metals. We also demonstrate the selective growth of the nano-whiskers on the substrate with micro-trench patterns. The metal nano-whiskers are useful for the nano electromechanical devices and vacuum microelectronics.

Type
Research Article
Copyright
Copyright © Materials Research Society 2008

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References

1. Suzuki, M., Nagai, K., Kinoshita, S., Nakajima, K., Kimura, K., Okano, T. and Sasakawa, K., Appl. Phys. Lett. 89, 133103 (2006).CrossRefGoogle Scholar
2. Suzuki, M., Nagai, K., Kinoshita, S., Nakajima, K., Kimura, K., Okano, T. and Sasakawa, K., J. Vac. Sci. Technol. A 25, 1098 (2007).CrossRefGoogle Scholar
3. Melmed, A. J. and Gomer, R., J. Chem. Phys. 34, 1802 (1961).CrossRefGoogle Scholar
4. Sethna, J. P., Science 318, 207 (2007).CrossRefGoogle ScholarPubMed
5. Csikor, F. F., Motz, C., Weygand, D., Zaiser, M. and Zapperi, S., Science 318, 251 (2007).CrossRefGoogle Scholar

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