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Novel Methods for Deposition of Boron Carbide Films
Published online by Cambridge University Press: 21 February 2011
Abstract
By combining pentaborane (B5H9) and decarborane (B10H14) with methanein a plasma reactor, a variety of boron-carbides can be made over a wide range of compositions. The resulting thin films have uniform composition and appear to be polycrystalline.
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- Copyright © Materials Research Society 1991
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