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New Processing Techniques for the Creation of Micro-Opto-Mechanical Machines and Photonic Devices Embedded in Glass

Published online by Cambridge University Press:  11 February 2011

Meg Abraham
Affiliation:
The Aerospace Corporation, El Segundo, CA 90245
Peter Fuqua
Affiliation:
The Aerospace Corporation, El Segundo, CA 90245
David P. Taylor
Affiliation:
The Aerospace Corporation, El Segundo, CA 90245
William W. Hansen
Affiliation:
The Aerospace Corporation, El Segundo, CA 90245
Henry Helvajian
Affiliation:
The Aerospace Corporation, El Segundo, CA 90245
Nathan Presser
Affiliation:
The Aerospace Corporation, El Segundo, CA 90245
Frank Livingston
Affiliation:
The Aerospace Corporation, El Segundo, CA 90245
Stephen La Lumondiere
Affiliation:
The Aerospace Corporation, El Segundo, CA 90245
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Abstract

The use of lasers to create intricate three-dimensional and buried structures [1] in photostructural glass has been well demonstrated at The Aerospace Corporation over the past four years. In these instances the glass used (Foturan™, made by the Schott Group) forms a silver nucleation sites on exposure to intense UV laser light via a two-photon process. Subsequent annealing causes a localized crystal growth to form a meta-silicate phase which can be etched in dilute hydrofluoric acid at rates of 20 to 50 times that of the unprocessed glass. We are now in the process of experimenting with another formulation of photosensitive glass, also pioneered by Corning Glass Works, that behaves differently during the bake process. In the second case, a photoexposure and bake process creates a silver-halide crystal and forms an adjacent void in the glass. A second photoexposure and bake allows for the migration of more silver into the void creating patterned formations of silver nano-wires [2]. Recent experiments with this type of glass have shown that the manipulation of the size and density of the embedded nano-wires as well as the overall pattern of the clusters can be controlled using direct-write exposure to laser processing.

Type
Research Article
Copyright
Copyright © Materials Research Society 2003

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References

1. Hansen, W. W., Fuqua, P., Livingston, F., Huang, A., Abraham, M. H., Taylor, D. P., Janson, S., and Helvajian, H., The Industrial physicist, June/July, 18, (2002).Google Scholar
2. Stookey, S. D., Beall, G. H., and Pierson, J. E.. Journal of Applied Physics, 49, 5114, (1978).CrossRefGoogle Scholar
3. Fuqua, P. D., Taylor, D. P., Helvajian, H.; Hansen, W. W., Abraham, M. H. in Materials Development for Direct Write Technologies, edited by Christy, D., Ginley, D., Helvajian, H. and Taylor, D. P. (Mater. Res. Soc. Proc. 624, Warrendale, PA, 2000) pp 7987.Google Scholar
4. Cheang-Wong, J. C., Oliver, A, Roiz, J., Rodriguez-Fernandez, L., Hernandez, J. M., and Crespo-Sosa, A., J. Phys.: Cond. Mat., 13, 10207, (2001).Google Scholar
5. Kaempfe, M., Rainer, T., Berg, K.-J., Seifert, G., and Graener, H., Appl. Phys. Lett., 74, 1200 (1999).CrossRefGoogle Scholar
6. Watanabe, Y., Inoue, M. and Tsuchiya, T., J. Appl. Phys., 84, 6457, (1998).CrossRefGoogle Scholar

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New Processing Techniques for the Creation of Micro-Opto-Mechanical Machines and Photonic Devices Embedded in Glass
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