Skip to main content Accessibility help
×
Home
Hostname: page-component-568f69f84b-jg9p7 Total loading time: 0.142 Render date: 2021-09-23T02:21:37.031Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": true, "newCiteModal": false, "newCitedByModal": true, "newEcommerce": true, "newUsageEvents": true }

Microstructures of Luminescent nc-Si by Excimer Laser Annealing of a-Si:H

Published online by Cambridge University Press:  15 February 2011

Xinfan Huang
Affiliation:
Department of Physics and State Key Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, CHINA, kjchen@netra.nju.edu.cn, Center for Advanced Studies in Science and Technology of Microstructures, Nanjing 210093, CHINA
Wei Wu
Affiliation:
Department of Physics and State Key Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, CHINA, kjchen@netra.nju.edu.cn, Center for Advanced Studies in Science and Technology of Microstructures, Nanjing 210093, CHINA
Honghui Shen
Affiliation:
Department of Physics and State Key Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, CHINA, kjchen@netra.nju.edu.cn, Center for Advanced Studies in Science and Technology of Microstructures, Nanjing 210093, CHINA
Wei Li
Affiliation:
Department of Physics and State Key Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, CHINA, kjchen@netra.nju.edu.cn, Center for Advanced Studies in Science and Technology of Microstructures, Nanjing 210093, CHINA
Xiaoyuan Chen
Affiliation:
Department of Physics and State Key Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, CHINA, kjchen@netra.nju.edu.cn, Center for Advanced Studies in Science and Technology of Microstructures, Nanjing 210093, CHINA
Jun Xu
Affiliation:
Department of Physics and State Key Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, CHINA, kjchen@netra.nju.edu.cn, Center for Advanced Studies in Science and Technology of Microstructures, Nanjing 210093, CHINA
Kunji Chen
Affiliation:
Department of Physics and State Key Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, CHINA, kjchen@netra.nju.edu.cn, Center for Advanced Studies in Science and Technology of Microstructures, Nanjing 210093, CHINA
Get access

Abstract

We have reported for the first time on visible photoluminescence (PL) in crystallized a-Si:H/a-SiNx:H multilayer structures by CW Ar ion laser annealing treatments. In this paper we present new results on visible PL from crystallized a-Si:H by using KrF excimer pulse laser (wavelength 248 nm) irradiating treatments. The transmission electron microscopy and Raman scattering studies reveal the microstructures of crystallized Si films, which depend on the pulse number and the pulse energy density of KrF laser. When the laser pulse energy density is higher than 520 mJ/cm2, the nanosized Si crystallites (nc-Si) can be formed from a-Si:H layers with a thickness of 100 nm and strong PL with a peak wavelength of 610 nm has been observed at room temperature.

Type
Research Article
Copyright
Copyright © Materials Research Society 1997

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1.Canham, L. T., Appl. Phys. Lett., 57, 1046 (1990)Google Scholar
2. for review see MRS Symp. Proc., No. 358, Boston (1994)Google Scholar
3.Furukawa, S. and Miyasato, T., Jpn. J. Appl. Phys., 27, L2207 (1988)Google Scholar
4.Takagi, H., Ogawa, H., Yamazaki, Y., Ishizaki, A. and Nakagiri, T., Appl. Phys. Lett., 56, 2379 (1990)Google Scholar
5.Edelberg, E., Bergh, S., Naone, R., Hall, M. and Aydil, E.S., Appl. Phys. Lett., 68, 1415 (1996)Google Scholar
6.Chen, K. J., Huang, X.F., Xu, J. and Feng, D., Appl. Phys. Lett., 61, 2069 (1992)Google Scholar
7.Stutzman, M., Brandt, M.S., Bustarret, E., Fuchs, H.D., Rosenbauer, M., Hopner, A. and Weber, J., J. Non-Cryst. Solids, 164–166, 931 (1993)Google Scholar
8.Deak, P., Rosenbauer, M., Stutzman, M., Weber, J. and Brandt, M.S., Phys. Rev. Lett., 69, 2531 (1992)Google Scholar
9.Im, J. S. and Kim, H.J., Appl. Phys. Lett., 63, 1969 (1993)Google Scholar
10.Cheng, X. G., Xia, H. and Chen, K.J., Phys. Stat. Sol. A, 118, K51 (1990)Google Scholar

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Microstructures of Luminescent nc-Si by Excimer Laser Annealing of a-Si:H
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Microstructures of Luminescent nc-Si by Excimer Laser Annealing of a-Si:H
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Microstructures of Luminescent nc-Si by Excimer Laser Annealing of a-Si:H
Available formats
×
×

Reply to: Submit a response

Please enter your response.

Your details

Please enter a valid email address.

Conflicting interests

Do you have any conflicting interests? *