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Microstructures of Amorphic Diamond™ Films Deposited by Laser-Ablation

Published online by Cambridge University Press:  10 February 2011

Hyunchul Sohn
Affiliation:
Materials Science Division, Lawrence Berkeley Laboratory, Berkeley, California
Kannan Krishnan
Affiliation:
Materials Science Division, Lawrence Berkeley Laboratory, Berkeley, California
Richard Fink
Affiliation:
SI Diamond Technology, Austin, Texas
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Abstract

Microstructures of Amorphic Diamond™ films deposited by laser ablation method were investigated using transmission electron microscopy. The AD films matrix was homogeneous with a sp3-type bonding fraction of 40%∼45% confirmed by electron energy-loss spectroscopy. The sp3 bonding fraction decreased monotonically with increasing annealing temperature. The main inhomogeneity in Amorphic Diamond™ was observed to be particulates of high density (>105/cm2) distributed through the depth of the film. Particulate size ranged from ∼10nm to a few μm and most of them were identified to be graphite. Large particles (>0.5μm) were agglomerates of smaller graphite crystallites. Possible mechanisms for cold field emission are discussed based on the microstructures observed in these AD films.

Type
Research Article
Copyright
Copyright © Materials Research Society 1996

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References

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