Skip to main content Accessibility help
×
Home
Hostname: page-component-99c86f546-4hcbs Total loading time: 0.122 Render date: 2021-11-30T07:25:55.024Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": true, "newCiteModal": false, "newCitedByModal": true, "newEcommerce": true, "newUsageEvents": true }

Microstructure of the Silicon Film Prepared Near the Phase Transition Regime from Amorphous To Nanocrystalline

Published online by Cambridge University Press:  11 February 2011

Shibin Zhang
Affiliation:
State Key Laboratory for Surface Physics, Center of Condensed State Physics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
Xianbo Liao
Affiliation:
State Key Laboratory for Surface Physics, Center of Condensed State Physics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
Yanyue Xu
Affiliation:
State Key Laboratory for Surface Physics, Center of Condensed State Physics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
Zhihua Hu
Affiliation:
State Key Laboratory for Surface Physics, Center of Condensed State Physics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
Xiangbo Zeng
Affiliation:
State Key Laboratory for Surface Physics, Center of Condensed State Physics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
Hongwei Diao
Affiliation:
State Key Laboratory for Surface Physics, Center of Condensed State Physics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
Muchang Luo
Affiliation:
State Key Laboratory for Surface Physics, Center of Condensed State Physics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
Guanglin Kong
Affiliation:
State Key Laboratory for Surface Physics, Center of Condensed State Physics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
Get access

Abstract

A kind of hydrogenated diphasic silicon films has been prepared by a new regime of plasma enhanced chemical vapor deposition (PECVD) near the phase transition regime from amorphous to nanocrystalline. The microstructural properties of the films have been investigated by the micro-Raman and Fourier transformed Infrared (FT-IR) spectra and atom force microscopy (AFM). The obtained Raman spectra show not only the existence of nano-scaled crystallites, but also a notable improvement in the medium-range order of the diphasic films. For the FT-IR spectra of this kind of films, it notes that there is a blueshift in the Si-H stretching mode and a redshift in the Si-H wagging mode in respect to that of typical amorphous silicon film. We discussed the reasons responsible for these phenomena by means of the phase transition, which lead to the formation of a diatomic hydrogen complex, H2* and their congeries.

Type
Research Article
Copyright
Copyright © Materials Research Society 2003

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Staebler, D.L., Wronski, C.R., Appl. Phys. Lett. 31, 292, 1977 Google Scholar
2. Meaudre, R., Butte, R., and Vignoli, S., J. Appl. Phys. 86, 946, 1999 Google Scholar
3. Roca, P., Cabarrocas, I, Fontcuberta, A., Morral, I, Poissant, Y., Thin Solid Films, 403–404, 39, 2002 Google Scholar
4. Voylesa, P.M., J. Appl. Phys. 90, 4437, 2001 Google Scholar
5. Pearce, Joshua M., Koval, Randy J., Ferlauto, Andre S., Collins, Robert W., and Wronski, Christopher R., Appl. Phys. Lett. 77, 3093, 2000 Google Scholar
6. Das, C., Ray, S., Thin Solid Films, 403–404, 81, 2002 Google Scholar
7. Sheng, Shuran, Liao, Xianbo, and Kong, Guanglin, Appl. Phys. Lett., 78, 2509, 2001 Google Scholar
8. Zhang, Shibin, Kong, Guanglin, Wang, Yongqian, Sheng, Shuran, and Liao, Xianbo, Solid State Commun., 122, 283, 2002 Google Scholar
9. Sheng, Shuran, Kong, Guanglin, and Liao, Xianbo, J. Appl. Phys., 80, 3607, 1996 Google Scholar
10. veprk, S., Sarott, F.A., and Iqbal, Z., Phys. Rev. B, 36, 3344, 1987 Google Scholar
11. Zi, J., Buscher, H., Faller, C., Ludwing, W., Zhang, K., Xie, And X., Appl. Phys. Lett. 69, 200, 1996 Google Scholar
12. Achiq, A., Rizk, R., Gourbilleau, F., and Madelon, R., J. Appl. Phys., 83, 5797, 1998 Google Scholar
13. Balkansky, M, Wallis, R F and Haro, E, Phys. Rev. B 28, 1928, 1983 Google Scholar
14. Tour, H., Zellama, K., Morhange, J.F., Phys. Rev. B 52., 10076, 1999 Google Scholar
15. Langford, A.A., Fleet, M.L., Nelson, B.P., Lanford, W.A., Maley, N., Phys. Rev. B 45, 13367, 1992 Google Scholar
16. Deng, X.M., Phys. Rev. B 43, 4820, 1991 Google Scholar
17. Zhang, S.B. and Jackson, W.B., Phys. Rev. B, 43, 12142, 1991 Google Scholar

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Microstructure of the Silicon Film Prepared Near the Phase Transition Regime from Amorphous To Nanocrystalline
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Microstructure of the Silicon Film Prepared Near the Phase Transition Regime from Amorphous To Nanocrystalline
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Microstructure of the Silicon Film Prepared Near the Phase Transition Regime from Amorphous To Nanocrystalline
Available formats
×
×

Reply to: Submit a response

Please enter your response.

Your details

Please enter a valid email address.

Conflicting interests

Do you have any conflicting interests? *