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Microstructure and Mechanical Properties of Combinatorially Prepared Thin Film Aluminum-Silicon Nanocomposites

Published online by Cambridge University Press:  26 February 2011

Charles H. Olk
Affiliation:
charles.h.olk@gm.com, General Motors Research and Development, Materials and Processes Lab, MC 480-106-224, 30500 Mound Rd., Warren, MI, 48090-9055, United States, 5869860611, 5869863091
Michael Lukitsch
Affiliation:
Michael.Lukitsch@gm.com, General Motors Research and Developmen, Materials and Processes Lab, MC 480-106-224, 30500 Mound Rd, Warren, MI, 48090-9055, United States
Daad B Haddad
Affiliation:
Daad.Haddad@gm.com, Purdue University, School of Materials Engineering, West Lafayette, IN, 47907, United States
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Abstract

e have undertaken the exploration of the AlxSi1-x systems to discover new alloys with enhanced properties. We describe the mechanical properties of thin film AlxSi1-x alloys determined through indentation experiments. Combinatorial methods were used to systematically control thin film microstructure through variations in composition and growth temperature. Discrete libraries of compositionally graded films have been sputter deposited onto silicon substrates to produce two structural phase regions: amorphous Al-Si and amorphous Si plus crystalline Al. The mechanical properties of the thin films were determined by analyzing the load-displacement traces based on the Oliver-Pharr method. X-ray diffraction was used to investigate the microstructures and determine the crystallite sizes.

Type
Research Article
Copyright
Copyright © Materials Research Society 2007

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