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Microstructural Characterization of Multiphase Coatings Produced By Chemical Vapor Deposition
Published online by Cambridge University Press: 21 February 2011
Abstract
Chemical vapor deposition has been utilized to produce ternary, multiphase coatings of various compositions of silicon carbide (SiC) with Ti, Cr, and Mo. Thermodynamic calculations have been performed for a variety of experimental conditions in each system. Scanning, transmission and analytical electron microscopy, and X-ray diffraction techniques have been used to characterize the microstructures and to determine compositions.
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- Copyright © Materials Research Society 1990
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