Skip to main content Accessibility help
×
Home
Hostname: page-component-99c86f546-4hcbs Total loading time: 0.269 Render date: 2021-12-07T13:05:29.689Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": true, "newCiteModal": false, "newCitedByModal": true, "newEcommerce": true, "newUsageEvents": true }

Mechanical characterization of “blister” defects on optical oxide multilayers using nanoindentation

Published online by Cambridge University Press:  25 May 2012

K. Mehrotra*
Affiliation:
Department of Mechanical Engineering, University of Rochester, Rochester, NY 14627 Laboratory for Laser Energetics, University of Rochester, Rochester, NY 14627
H.P. Howard
Affiliation:
Materials Science Program University of Rochester, Rochester, NY 14627 and, Laboratory for Laser Energetics, University of Rochester, Rochester, NY 14627
S.D. Jacobs
Affiliation:
Materials Science Program University of Rochester, Rochester, NY 14627 and, Laboratory for Laser Energetics, University of Rochester, Rochester, NY 14627
J.C. Lambropoulos
Affiliation:
Department of Mechanical Engineering, University of Rochester, Rochester, NY 14627 Materials Science Program University of Rochester, Rochester, NY 14627 and, Laboratory for Laser Energetics, University of Rochester, Rochester, NY 14627
*
a Electronic mail: mehrotra@me.rochester.edu
Get access

Abstract

We characterize “blisters”, defects observed in multilayer dielectric (MLD) coatings after exposure to acid cleaning procedures. Nanoindentation is used to make site-specific indentations across blisters to measure the mechanical response, especially their compliance under different conditions of loading. Two regions of statistically different mechanical response are identified within a blister defect and compared to the undisturbed regions of the MLD coating. The indentation response of blisters can vary across samples, and we suggest reasons for this variation.

Type
Articles
Copyright
Copyright © Materials Research Society 2012

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Schattenburg, M.L., et al. ., “Advanced interference lithography for nanomanufacturing”, ISNM (2006)Google Scholar
Smith, D.J., et al. ., “Large area pulse compression gratings fabricated onto fused silica using scanning beam interference lithography”, ICUIL (2008)Google Scholar
Ashe, B., et al. ., “Optimizing a cleaning process for multilayer-dielectric (MLD) diffraction gratings”, LLE Review 112, 228 (2007)Google Scholar
Mehrotra, K., et al. ., “Nanoindentation of high-aspect ratio pillar structures on optical multilayer dielectric diffraction gratings”, AIP Advances 1, 042179 (2011)CrossRefGoogle Scholar
Howard, H. and Mehrotra, K., “Investigation of the blister defect in MLD Gratings using nanoindentation and microscopy”, MRS Symposium at the University of Rochester (2011)Google Scholar

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Mechanical characterization of “blister” defects on optical oxide multilayers using nanoindentation
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Mechanical characterization of “blister” defects on optical oxide multilayers using nanoindentation
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Mechanical characterization of “blister” defects on optical oxide multilayers using nanoindentation
Available formats
×
×

Reply to: Submit a response

Please enter your response.

Your details

Please enter a valid email address.

Conflicting interests

Do you have any conflicting interests? *