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Low temperature CVD growth of graphene nano-flakes directly on high K dielectrics

Published online by Cambridge University Press:  02 March 2011

Mark H. Rümmeli
Affiliation:
Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden e. V., PF 27 01 16, 01171 Dresden,Germany Technische Universität Dresden, 01062 Dresden, Germany
Alicja Bachmatiuk
Affiliation:
Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden e. V., PF 27 01 16, 01171 Dresden,Germany
Arezoo Dianat
Affiliation:
Technische Universität Dresden, 01062 Dresden, Germany
Andrew Scott
Affiliation:
Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden e. V., PF 27 01 16, 01171 Dresden,Germany
Felix Börrnert
Affiliation:
Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden e. V., PF 27 01 16, 01171 Dresden,Germany
Imad Ibrahim
Affiliation:
Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden e. V., PF 27 01 16, 01171 Dresden,Germany Technische Universität Dresden, 01062 Dresden, Germany
Shasha Zhang
Affiliation:
Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden e. V., PF 27 01 16, 01171 Dresden,Germany
Ewa Borowiak-Palen
Affiliation:
Zachodniopomorski Uniwersytet Technologiczny, Pulaskiego 10, 70322 Szczecin, Poland
Gianaurelio Cuniberti
Affiliation:
Technische Universität Dresden, 01062 Dresden, Germany Division of IT Convergence Engineering and National Center for Nanomaterials Technology,POSTECH, Pohang 790-784, Republic of Korea
Bernd Büchner
Affiliation:
Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden e. V., PF 27 01 16, 01171 Dresden,Germany
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Abstract

The potential of MgO and ZrO2 as catalytically active substrates for graphene formation via thermal CVD is explored. Experimental observations show the growth of single and multi-layer graphene nano-flakes over MgO and ZrO2 at low temperatures. The graphene nano-flakes are found to anchor at step sites. Ab initio calculations indicate step sites are crucial to adsorb and crack acetylene.

Type
Research Article
Copyright
Copyright © Materials Research Society 2011

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References

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