Skip to main content Accessibility help
×
Home
Hostname: page-component-59b7f5684b-fmrbl Total loading time: 0.602 Render date: 2022-09-28T10:29:29.941Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "useRatesEcommerce": false, "displayNetworkTab": true, "displayNetworkMapGraph": false, "useSa": true } hasContentIssue true

Laser Vaporization and Deposition of Lead Zirconate Titanate

Published online by Cambridge University Press:  25 February 2011

Peter K. Schenck
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899
Lawrence P. Cook
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899
Jianrong Zhao
Affiliation:
Guest Scientist, Chinese Academy of Science, Beijing, Peoples Republic of China
John W. Hastie
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899
Edward N. Farabaugh
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899
Chwan-Kang Chiang
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899
Mark D. Vaudin
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899
Philip S. Brody
Affiliation:
Harry Diamond Laboratories, Adelphi, MD.
Get access

Abstract

Laser-induced vaporization of ceramics shows promise as a technique for the deposition of thin films of these materials. Critical to the utility of this technique is an understanding of the laser-material interaction, plume formation and dynamics, material transport and how variations in the vaporization conditions affect the deposited film. Lead zirconate titanate (PZT, Zr/Ti-47/53) targets were irradiated using a q-switched Nd:YAG laser (15 ns, 100 mJ at 1.064 /μm) . The deposition chamber was maintained at a pressure of 100 mTorr oxygen. Material from the plume was collected on silicon wafer substrates, suspended 1.0 - 3.0 cm above the target. The films were characterized by SEM/EDX, TEM, x-ray diffraction and electrical measurements before and after annealing. Very thin films were deposited on carbon coated metal grids for observation in the TEM using a hot stage to study crystallization. Temporally and spatially resolved spectra of the light emitted by the laser-generated plume were obtained with an optical multichannel analyzer (0MA) to yield information on the plume generation and chemistry of the deposition process. These spectra indicate that under these conditions a plasma is created above the target surface which persists for -100 ns after the laser pulse.

Type
Research Article
Copyright
Copyright © Materials Research Society 1990

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1 Krehl, P., Schwirke, F. and Cooper, A.W., “Correlation of Stress-Wave Profiles and the Dynamics of the Plasma Produced by Laser Irradiation of Plane Solid Targets”, J. Appi. Phys., 46 [10], 44004406 (1975).Google Scholar
2 Shen, G. and Yeung, E.S., “A Spatial and Temporal Probe for Laser-Generated Plumes Based on Density Gradients”, Anal. Chem., 60 [9], 864868 (1988).Google Scholar
3 Schenck, P.K., Bonnell, D.W., and Hastie, J.W., “Insitu Analysis of Laser-Induced Vapor Plumes”, Am. Vac. Soc, Proc. Joint Int. Laser Science and Am. Vac. Soc. Conf., Atlanta, October, 1988 (in Press).Google Scholar
4 Cook, L. P., Schenck, P. K., Zhao, J., Farabaugh, E. N., and Chiang, C. K., “Ceramic Thin Films by Laser Deposition”, to be published in Proc. Symp. on Ceramic Thin and Thick Films, April, 1989, ACerS.Google Scholar

Save article to Kindle

To save this article to your Kindle, first ensure coreplatform@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about saving to your Kindle.

Note you can select to save to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be saved to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Laser Vaporization and Deposition of Lead Zirconate Titanate
Available formats
×

Save article to Dropbox

To save this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Dropbox account. Find out more about saving content to Dropbox.

Laser Vaporization and Deposition of Lead Zirconate Titanate
Available formats
×

Save article to Google Drive

To save this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Google Drive account. Find out more about saving content to Google Drive.

Laser Vaporization and Deposition of Lead Zirconate Titanate
Available formats
×
×

Reply to: Submit a response

Please enter your response.

Your details

Please enter a valid email address.

Conflicting interests

Do you have any conflicting interests? *