Skip to main content Accessibility help
×
Home
Hostname: page-component-79b67bcb76-5vsr4 Total loading time: 0.221 Render date: 2021-05-14T21:15:22.958Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": false, "newCiteModal": false, "newCitedByModal": true, "newEcommerce": true }

Laser Direct Writing of Aluminum

Published online by Cambridge University Press:  26 February 2011

T. Cacouris
Affiliation:
Microelectronics Sciences Laboratories, Columbia University, New York, N.Y. 10027
G. Scelsi
Affiliation:
Microelectronics Sciences Laboratories, Columbia University, New York, N.Y. 10027
R. Scarmozzino
Affiliation:
Microelectronics Sciences Laboratories, Columbia University, New York, N.Y. 10027
R.M. Osgood Jr.
Affiliation:
Microelectronics Sciences Laboratories, Columbia University, New York, N.Y. 10027
R.R. Krchnavek
Affiliation:
Bell Communications Laboratories, 435 South Str., Morristown, N.J. 07960
Get access

Abstract

We report, for the first time, laser direct writing of high conductivity aluminum interconnects from dimethylaluminum hydride (DMALH). These lines were deposited from a metallorganic gas with a focused deep-UV laser beam and were directly connected to aluminum test structures. Electrical measurements and Auger electron spectroscopy were used to characterize the laser deposited films.

Type
Research Article
Copyright
Copyright © Materials Research Society 1998

Access options

Get access to the full version of this content by using one of the access options below.

References

1 Kishida, S., Morishige, Y., Uesugi, F., Yokoyama, H., Technical Digest, CLEO 87, Baltimore, MD. April 1987, p. 282.Google Scholar
2 Gilgen, H.H., Cacouris, T., Shaw, P.S., Krchnavek, R.R., Osgood, R.M. Jr., Appl. Phys. B 42 (2), March 1987.Google Scholar
3 Gilgen, H.H., Krchnavek, R.R., Cacouris, T., Osgood, R.M. Jr., Proc. Materials Research Society, Boston, MA., Dec. 1985.Google Scholar
4 Krchnavek, R.R., Cacouris, T., Gilgen, H.H., Osgood, R.M. Jr., Proc. MRS, Boston, MA., Dec. 1985.Google Scholar
5 Lax, M., J. Appl. Phys. 48 (9) 3919 (1977).CrossRefGoogle Scholar
6 Cacouris, T., Scelsi, G., Beach, R., Osgood, R.M. Jr., Krchnavek, R.R., Technical Digest, Postdeadline Papers, CLEO 87, Baltimore, MD. April 1987, p.289.Google Scholar
7 Wood, T.H., White, J.C., Thacker, B.A., Appl. Phys. Lett. 42(5), 408 (1983).CrossRefGoogle Scholar
8 Cacouris, T., Krchnavek, R.R., Gilgen, H.H., Osgood, R.M. Jr., Proc. Int'l Electron Dev. Meeting, Washington, D.C., Dec. 1985, p. 594.Google Scholar

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Laser Direct Writing of Aluminum
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Laser Direct Writing of Aluminum
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Laser Direct Writing of Aluminum
Available formats
×
×

Reply to: Submit a response


Your details


Conflicting interests

Do you have any conflicting interests? *