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Laser Deposition and Patterning of High-Temperature Superconductors

Published online by Cambridge University Press:  21 February 2011

D. BÅuerle
Affiliation:
Angewandte Physik, Johannes-Kepler-Universitát Linz, A-4040 Linz, Austria
J. Heitz
Affiliation:
Angewandte Physik, Johannes-Kepler-Universitát Linz, A-4040 Linz, Austria
W. Ludorf
Affiliation:
Angewandte Physik, Johannes-Kepler-Universitát Linz, A-4040 Linz, Austria
P. Schwab
Affiliation:
Angewandte Physik, Johannes-Kepler-Universitát Linz, A-4040 Linz, Austria
X.Z. Wang
Affiliation:
Angewandte Physik, Johannes-Kepler-Universitát Linz, A-4040 Linz, Austria
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Abstract

Superconducting films of Y-Ba-Cu-O and Bi-Sr-Ca-Cu-O on (100) SrTiO3 and (100) MgO substrates have been fabricated by reactive excimer-laser sputtering from ceramic targets. Film patterning by laser-induced reduction/metallization, oxidation, and ablation has been investigated.

Type
Research Article
Copyright
Copyright © Materials Research Society 1990

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References

1. Bäuerle, D., Appl. Phys. A 48, 527 (1989).CrossRefGoogle Scholar
2. Ludorf, W., Wang, X.Z., and Bäuerle, D., Appl. Phys. A 49, 221 (1989).CrossRefGoogle Scholar
3. Liberts, G., Eyett, M., and Bfuerle, D., Appl. Phys. A 45, 313 (1988).CrossRefGoogle Scholar
4. Liberts, G., Eyett, M. and Bäuerle, D., Appl. Phys. A 46, 331 (1988).CrossRefGoogle Scholar
5. Eyett, M. and Bäuerle, D., Appl. Phys. Lett. 51, 2054 (1987).CrossRefGoogle Scholar
6. Bäuerle, D., Eyett, M., Kolzer, U., Kullmer, R., Mogyorosi, P., and Piglmayer, K., in Laser- and Particle-Beam Chemical Processing for Microelectronics, eds. Ehrlich, D.J., Higashi, G.S., Oprysko, M.M. (Materials Research Society 1988 Symposium Proceedings, Vol. 101) p. 411.Google Scholar

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