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Laser Deposition and Patterning of High-Temperature Superconductors
Published online by Cambridge University Press: 21 February 2011
Abstract
Superconducting films of Y-Ba-Cu-O and Bi-Sr-Ca-Cu-O on (100) SrTiO3 and (100) MgO substrates have been fabricated by reactive excimer-laser sputtering from ceramic targets. Film patterning by laser-induced reduction/metallization, oxidation, and ablation has been investigated.
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