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Investigation of Fired and Non-fired Si-SiNx Interface Properties by Deep-level Transient Spectroscopy measurements

Published online by Cambridge University Press:  31 January 2011

Chun Gong
Affiliation:
chun.gong@imec.be, IMEC, PV, Leuven, Belgium
Eddy Simoen
Affiliation:
eddy.simoen@imec.be, IMEC, Leuven, Belgium
Rui Yang
Affiliation:
rui.yang@imec.be, IMEC, Leuven, Belgium
Niels Posthuma
Affiliation:
niels.posthuma@imec.be, IMEC, PV, Leuven, Belgium
Emmanuel Van Kerschaver
Affiliation:
Emmanuel.VanKerschaver@imec.be, IMEC, PV, Leuven, Belgium
Jef Poortmans
Affiliation:
jef.poortmans@imec.be, IMEC, PV, Leuven, Belgium
Robert Mertens
Affiliation:
Robert.Mertens@imec.be, IMEC, Leuven, Belgium
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Abstract

In this paper, fired and non-fired direct PECVD deposited Si-SiNx interface properties with and without NH3 pretreatment on both n- and p-type mono-crystalline silicon samples were investigated with deep-level transient spectroscopy (DLTS) measurements. A and B defect states are identified at the Si-SiNx interface. Energy-dependent electron and hole capture cross sections were measured by small-pulse DLTS. Fired samples with NH3 pretreatment show the lowest DLTS signals, which suggests the lowest overall Dit. The combination of NH3 pretreatment and firing is also suggested for application in the solar cell fabrication.

Type
Research Article
Copyright
Copyright © Materials Research Society 2010

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References

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Investigation of Fired and Non-fired Si-SiNx Interface Properties by Deep-level Transient Spectroscopy measurements
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