Hostname: page-component-7bb8b95d7b-dtkg6 Total loading time: 0 Render date: 2024-09-18T16:13:47.537Z Has data issue: false hasContentIssue false
  • English
  • Français

Intrinsic Growth Stress in Thermally Grown and Annealed SiO2 Thin Films: Control of Stress-Induced Electronically Active Defects at Si/SiO2 Interfaces

Published online by Cambridge University Press:  25 February 2011

C. H. Bjorkman ,
D. R. Lee  and
G. Lucovsky
C. H. Bjorkman
Affiliation:
Departments of Physics and Materials Science & Engineering, North Carolina State University Raleigh, North Carolina 27695-8202, U.S.A.
D. R. Lee
Affiliation:
Departments of Physics and Materials Science & Engineering, North Carolina State University Raleigh, North Carolina 27695-8202, U.S.A.
G. Lucovsky
Affiliation:
Departments of Physics and Materials Science & Engineering, North Carolina State University Raleigh, North Carolina 27695-8202, U.S.A.
Get access

Abstract

We find that the density of electronically active defect states, formed close to the Si/SiO2 interface during high temperature oxidation (Tox > 800°C), is proportional to the thickness-averaged stress or strain in the oxide layer. This was established by measuring the midgap interface state density, Dit, and correlating it with: i) a direct measurement of the stress, using a beam deflection technique; and ii) a determination of the oxide strain, using infrared (IR) spectroscopy and a model that relates the frequency of the Si-O bond-stretching vibration to the microscopic strain in the oxide.In addition, the elastic stress at the Si/SiO2 interface has been modified by film deposition onto the SiO2 surface of Si:3N4 film or a variable thickness of an Al gate metal. The additional elastic stress introduced by these depositions did not influence Dit. These observations lead us to conclude that interface traps are generated by “local plastic deformations” that occur during the oxidation process, and are localized in the immediate vicinity of the Si/SiO2 interface.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 202: Symposium C – Evolution of Thin Film and Surface Microstructure , 1990 , 271
Copyright
Copyright © Materials Research Society 1991

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Lucovsky, G., Mantini, MJ., Srivastava, J.K., and Irene, E.A., J. Vac. Sci. Technol. B5, 530 (1987).Google Scholar
2. Fitch, J.T. and Lucovsky, G., MRS Symp. Proc. 92, 89 (1987)Google Scholar
MRS Symp. Proc. 105, 151 (1988)Google Scholar
AIP Conf. Proc. 167, 124 (1988).Google Scholar
3. Lucovsky, G., Fitch, J.T., Kobeda, E., and Irene, E.A., in “The Physics and Chemistry of SiO2 and the Si-SiO2 Interface”, ed. by Helms, C.R. and Deal, B.E. (Plenum Press, New York, 1988), p. 139.Google Scholar
4. Fitch, J.T., Kobeda, E., Lucovsky, G., and Irene, E.A., J. Vac. Sci. Technol. B7, 153 (1989).Google Scholar
5. Fitch, J.T., Bjorkman, C.H., Sumakeris, J.J., and Lucovsky, G., MRS Symp. Proc. 130, 289 (1988).Google Scholar
6. Bjorkman, C.H., Fitch, J.T., and Lucovsky, G., MRS Symp. Proc. 146, 197 (1989).Google Scholar
7. Kobeda, E. and Irene, E.A., J. Vac. Sci. Technol. B4, 720 (1986)Google Scholar
J. Vac. Sci. Technol. B5, 15 (1987)Google Scholar
J. Vac. Sci. Technol. B6, 574 (1988).Google Scholar