Skip to main content Accessibility help
×
Home
Hostname: page-component-dc8c957cd-bh266 Total loading time: 0.415 Render date: 2022-01-28T10:12:47.799Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": true, "newCiteModal": false, "newCitedByModal": true, "newEcommerce": true, "newUsageEvents": true }

In-homogeneous precipitation of Iron from SC1 Solutions

Published online by Cambridge University Press:  10 February 2011

D. Martin Knotter
Affiliation:
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium Assigned to IMEC from Philips Research, Prof Holstlaan 4 (WAGO 1), 5656AA Eindhoven, the Netherlands, knotter@natlab.research.philips.com
Stefan de Gendt
Affiliation:
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
Paul Mertens
Affiliation:
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
Marc M. Heyns
Affiliation:
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
Get access

Abstract

It is found that Fe in a ppb level Fe-spiked SC1 solution precipitates in-homogenous. The local high iron concentrations are difficult to rinse, create micro-roughness, and induce weak spots in capacitors. With AFM it has been shown that rings of 3–8 μm are etched in the silicon and that the etch products (silicates) are deposited on one side just outside the ring. The capacitor yield loss induced by this SC1 treatment can not be recovered fully by a subsequent SC2 or dHCL step, while a dHF/dHCl does fully recover the yield and removes the iron and silicate rim.

Type
Research Article
Copyright
Copyright © Materials Research Society 1997

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Hurd, T. Q., Mertens, P. W., Schmidt, H. F., Ditter, D., Hall, L. H., Meuris, M. and Heyns, M. M in IES 40th Annual Technical Meeting Proceedings vol.1 (IES, Mount Prospect, Illinois, 1994) p. 218.Google Scholar
2. Schmidt, H. F., Meuris, M., Mertens, P. W., Rontondaro, A. L. P., Heyns, M. M., Hurd, T. Q. and Hatcher, Z., Jpn. J. Appl. Phys. 34, pp. 727–31 (1995).CrossRefGoogle Scholar
3. Mouche, L., Beneyton, B., Paillet, C., Joly, J. P., Tardif, F., Levy, D., Barla, K., Patruno, P., Tonti, A. and Sievert, W. in Proceedings of the 2th Int. Symp. on Ultra-clean Processing on Silicon Surfaces, edited by Heyns, M., Meuris, M. and Mertens, P. (ACCO, Leuven, Belgium), p. 19–22.Google Scholar
4. van den Meerakker, J. E. A. M. and van der Straaten, M. H. M., J. Electrochem. Soc. 137, pp. 1239–43 (1990).CrossRefGoogle Scholar

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

In-homogeneous precipitation of Iron from SC1 Solutions
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

In-homogeneous precipitation of Iron from SC1 Solutions
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

In-homogeneous precipitation of Iron from SC1 Solutions
Available formats
×
×

Reply to: Submit a response

Please enter your response.

Your details

Please enter a valid email address.

Conflicting interests

Do you have any conflicting interests? *