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Influence of Surface Relaxation on X-Ray Topographic Imaging of Interfacial Dislocations in Heterosystems.

Published online by Cambridge University Press:  26 February 2011

Gong-Da Yao
Affiliation:
Dept. of Materials Science & Engineering, SUNY at Stony Brook, NY 11794
Jun Wu
Affiliation:
Dept. of Materials Science & Engineering, SUNY at Stony Brook, NY 11794
Michael Dudley
Affiliation:
Dept. of Materials Science & Engineering, SUNY at Stony Brook, NY 11794
Vijay Shastry
Affiliation:
Dept. of Materials Science & Engineering, Ohio State University, Columbus Ohio 43210.
Peter Anderson
Affiliation:
Dept. of Materials Science & Engineering, Ohio State University, Columbus Ohio 43210.
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Abstract

The influence of surface relaxation on the imaging of dislocations in thin single crystal films, using white beam synchrotron radiation topography in grazing Bragg-Laue geometry, has been assessed. The predicted visibility of dislocation images on grazing Bragg- Laue topographs, for the particular case of interfacial edge dislocations in a GaAs/Si heterostructure, is shown to be strongly influenced. Agreement between predicted and observed visibility could only be obtained by incorporating the surface relaxation effects, which thus strongly influence the depth sensitivity of the technique, i.e. the ability to pinpoint the depth of a dislocation. Dislocation image widths are also influenced by these effects.

Type
Research Article
Copyright
Copyright © Materials Research Society 1991

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References

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