Skip to main content Accessibility help
×
Home
Hostname: page-component-59b7f5684b-npccv Total loading time: 0.346 Render date: 2022-09-28T09:22:47.621Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "useRatesEcommerce": false, "displayNetworkTab": true, "displayNetworkMapGraph": false, "useSa": true } hasContentIssue true

In Situ Monitoring in the Pulsed Laser Deposition of Ferroelectric Thin Films

Published online by Cambridge University Press:  15 February 2011

Peter K. Schenck
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899
Mark D. Vaudin
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899
Byeong W. Lee
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899
David W. Bonnell
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899
John W. Hastie
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899
Albert J. Paul
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899
Get access

Abstract

Optical multichannel emission spectroscopie studies and ICCD (intensified charge coupled device) imaging have been applied to real-time, in situ gas phase species identification and plume structure analysis during the pulsed excimer laser deposition (PLD) of various ferroelectric thin films. Additional information on the non-excited plume species has been obtained using molecular beam-sampling mass spectrometry. The materials studied included targets of PbZr0.53Ti0.47O3 (PZT) and BaTiO3. For the BaTiO3 films, the partial pressure of oxygen in the buffer gas and the atomic oxygen emission within the plume both correlated with the observed lattice parameter, as determined by X-ray analysis. Reduced plume oxygen content resulted in an increased lattice parameter that, in turn, could be related to a reduced oxygen content in the film. ICCD imaging of plumes from PZT targets identified the presence of ejected particulates in the plume after multiple laser shots had worked the target surface. Scanning electron microscopy (SEM) studies of the PZT target surface and film morphology, revealed cone-like formations on the target and éjecta on the films which correlated well with the ICCD observation of plume particulates.

Type
Research Article
Copyright
Copyright © Materials Research Society 1995

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Hastie, J.W., Bonneil, D.W., Paul, A.J., and Schenck, P.J. in Gas-Phase and Surface Chemistry in Electronic Materials Processing, edited by Mountziaris, T.J., Paz-Pujalt, G.R., Smith, F.T.J. and Westmoreland, P.R. (Mater. Res. Soc. Symp. Proc. 334, Pittsburgh, PA, 1994) pp. 305316.Google Scholar
2. Lee, B.W., Cook, L.P., Schenck, P.K., Wong-Ng, W., Chiang, C.K., Bennett, K.W. and Brody, P.S., Ferroelectrics Letters, in press (1994).Google Scholar
3. Brody, P.S., Rod, B.J., Cook, L.P. and Schenck, P.K. in Ferroelectric Thin Films It, edited by Kingon, A.I., Meyers, E.R. and Tuttle, B. (Mater. Res. Soc. Symp. Proc. 243, Pittsburgh, PA, 1992) pp. 2731.Google Scholar
4. Bennett, K.W., Brody, P.S., Rod, B.J., Cook, L.P., Schenck, P.K. and Dey, S. in in Ferroelectric Thin Films It, edited by Kingon, A.I., Meyers, E.R. and Tuttle, B. (Mater. Res. Soc. Symp. Proc. 243, Pittsburgh, PA, 1992) ref. 3, pp. 507512.Google Scholar
5. Hastie, J.W., Paul, A.J. and Bonnell, D.W., Specialists Workshop on Applications of Free-Jet Molecular Beam Sampling, Estes Park, October 11–14, 1994, in press (1994).Google Scholar
6. Schenck, P.K., Bonnell, D.W., and Hastie, J.W., High Temp. Science, 27, 483 (1990).Google Scholar
7. Kelly, R., Miotello, A., Mele, A., Giardini, A., Hastie, J.W., Schenck, P.K. and Okabe, H., Proc. of the Conf. on Desorption Induced by Electronic Transitions, Krakow, Poland, Oct. 1994.Google Scholar
8. Jorgenson, J.D., et al Phys. Rev. B, 36, 3608 (1987)CrossRefGoogle Scholar
9. Foltyn, S.R. in Pulsed Laser Deposition of Thin Films, edited by Chrisey, D.B. and Hubler, G.K. (John Wiley and Sons, New York, NY, 1994) pp. 89114.Google Scholar
10. Kools, J.C.S., in Pulsed Laser Deposition of Thin Films, edited by Chrisey, D.B. and Hubler, G.K. (John Wiley and Sons, New York, NY, 1994) ref. 9, pp. 455472.Google Scholar

Save article to Kindle

To save this article to your Kindle, first ensure coreplatform@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about saving to your Kindle.

Note you can select to save to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be saved to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

In Situ Monitoring in the Pulsed Laser Deposition of Ferroelectric Thin Films
Available formats
×

Save article to Dropbox

To save this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Dropbox account. Find out more about saving content to Dropbox.

In Situ Monitoring in the Pulsed Laser Deposition of Ferroelectric Thin Films
Available formats
×

Save article to Google Drive

To save this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Google Drive account. Find out more about saving content to Google Drive.

In Situ Monitoring in the Pulsed Laser Deposition of Ferroelectric Thin Films
Available formats
×
×

Reply to: Submit a response

Please enter your response.

Your details

Please enter a valid email address.

Conflicting interests

Do you have any conflicting interests? *