Hostname: page-component-586b7cd67f-g8jcs Total loading time: 0 Render date: 2024-12-08T00:13:13.482Z Has data issue: false hasContentIssue false

The Improvement of Thin Polymer Film Properties Through Plasma Immersion Ion Implantation and Deposition Technique

Published online by Cambridge University Press:  21 March 2011

Elidiane C. Rangel
Affiliation:
Laboratório de Plasmas e Aplicações – Universidade Estadual Paulista Guaratinguetá, SP 12516-410, Brazil
Nilson C. Cruz
Affiliation:
Laboratório de Plasmas e Aplicações – Universidade Estadual Paulista Guaratinguetá, SP 12516-410, Brazil
Rogério P. Mota
Affiliation:
Laboratório de Plasmas e Aplicações – Universidade Estadual Paulista Guaratinguetá, SP 12516-410, Brazil
Maurício A. Algatti
Affiliation:
Laboratório de Plasmas e Aplicações – Universidade Estadual Paulista Guaratinguetá, SP 12516-410, Brazil
Roberto Y. Honda
Affiliation:
Laboratório de Plasmas e Aplicações – Universidade Estadual Paulista Guaratinguetá, SP 12516-410, Brazil
Carlos Kuranaga
Affiliation:
Silva Laboratório Associado de Materiais e Sensores – Instituto Nacional de Pesquisas Espaciais São José dos Campos, SP 12201-970, Brazil
Marcos D. da
Affiliation:
Silva Laboratório Associado de Materiais e Sensores – Instituto Nacional de Pesquisas Espaciais São José dos Campos, SP 12201-970, Brazil
Get access

Abstract

Thin polymer films were deposited from acetylene and argon mixtures by plasma immersion ion implantation and deposition. The effect of the pulse frequency, ∨, on molecular structure, optical gap, contact angle and hardness of the films was investigated. It was observed progressive dehydrogenation of the samples and increment in the concentration of unsaturated carbon bonds as the pulse frequency was increased. Film hardness and contact angle increased and optical gap decreased with ∨. These results are interpreted in terms of the chain unsaturation and crosslinking.

Type
Research Article
Copyright
Copyright © Materials Research Society 2001

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Conrad, J. R. in Handbook of Plasma Immersion Ion Implantation and Deposition, Anders, A., ed., ( John Wiley and sons, N. Y., 2000) cap. 1.Google Scholar
[2] Anders, A., Anders, S., Brown, I. G. and Yu, K. M., Nucl. Instr. Meth. B 102 (1995) 132.Google Scholar
[3] Summonte, C., Mat. Res. Soc. Symp. Proc. 297 (1993) 395.Google Scholar
[4] Yasuda, H. in Plasma Polymerization (Academic Press, N.Y., 1985).Google Scholar
[5] Tajima, I. and Yamamoto, M., J. Polym. Sci. Polym. Chem. Ed. 23 (1985) 615 Google Scholar
[6] Lewis, M. B. and Lee, E. H., Nucl. Instr. Meth. B 61 (1991) 457.Google Scholar
[7] Dong, H. and Bell, T., Suf. Coat. Technol. 111 (1999) 29.Google Scholar
[8] Adamson, A. W. and Gast, A. P. in Physical Chemistry of Surfaces (John Wiley and Sons, N. Y., 1997) 363.Google Scholar
[9] Rangel, E. C., Cruz, N. C., Moraes, M. A. B. de and Lepienski, C. M., Surf. Coat. Technol. 127 (2000) 93.Google Scholar