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High-Rate Deposition Of Rare-Earth Doped Silicate Nanoparticles For Porous & Dense Optical Films

Published online by Cambridge University Press:  01 February 2011

Craig R. Horne ,
Pierre de Mascarel ,
Russell Blume ,
Jesse Jur ,
Cecile Cohen-Jonathan ,
Michael Chapin ,
Jonathan Posner ,
Wei Cho Foo ,
Christian Honeker  and
Qing Zhu
...Show all authors
Craig R. Horne
Affiliation:
NanoGram Corporation, 2911 Zanker Rd., San Jose, CA 95134 NeoPhotonics Corporation, 2911 Zanker Rd., San Jose, CA 95134
Pierre de Mascarel
Affiliation:
NeoPhotonics Corporation, 2911 Zanker Rd., San Jose, CA 95134
Russell Blume
Affiliation:
NeoPhotonics Corporation, 2911 Zanker Rd., San Jose, CA 95134
Jesse Jur
Affiliation:
NeoPhotonics Corporation, 2911 Zanker Rd., San Jose, CA 95134
Cecile Cohen-Jonathan
Affiliation:
NeoPhotonics Corporation, 2911 Zanker Rd., San Jose, CA 95134
Michael Chapin
Affiliation:
NeoPhotonics Corporation, 2911 Zanker Rd., San Jose, CA 95134
Jonathan Posner
Affiliation:
NeoPhotonics Corporation, 2911 Zanker Rd., San Jose, CA 95134
Wei Cho Foo
Affiliation:
NeoPhotonics Corporation, 2911 Zanker Rd., San Jose, CA 95134
Christian Honeker
Affiliation:
NeoPhotonics Corporation, 2911 Zanker Rd., San Jose, CA 95134
Qing Zhu
Affiliation:
NeoPhotonics Corporation, 2911 Zanker Rd., San Jose, CA 95134
Shiv Chiruvolu
Affiliation:
NeoPhotonics Corporation, 2911 Zanker Rd., San Jose, CA 95134
Ronald Mosso
Affiliation:
NanoGram Corporation, 2911 Zanker Rd., San Jose, CA 95134 NeoPhotonics Corporation, 2911 Zanker Rd., San Jose, CA 95134
William McGovern
Affiliation:
NanoGram Corporation, 2911 Zanker Rd., San Jose, CA 95134 NeoPhotonics Corporation, 2911 Zanker Rd., San Jose, CA 95134
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Abstract

A novel deposition process has been developed for manufacturing of high quality rare-earth doped glass films with complex composition. This process, Laser Reactive Deposition (LRDTM), comprises photothermal laser pyrolysis using an aerosol feedstock coupled with deposition of the resulting nanoparticle product onto Si substrates with our without an underlying glass film. This paper describes this novel process as well as the structure, properties and performance of the Erdoped, multicomponent silicate glass films produced to date with this process.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 866 , 2005 , V2.7
Copyright
Copyright © Materials Research Society 2005

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