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High Temperature Plasmonic Photonic Crystal MEMS Emitter

Published online by Cambridge University Press:  31 January 2011

Irina Puscasu
Affiliation:
irina.puscasu@icxt.com, ICx, Cambridge, Massachusetts, United States
Edward Johnson
Affiliation:
ed.johnson@icxt.com, United States
Andrew Taylor
Affiliation:
andrew.taylor@icxt.com, United States
Brent Schell
Affiliation:
brent.schell@icxt.com, ICx, Cambridge, Massachusetts, United States
William Schaich
Affiliation:
wls@sw163.physics.indiana.edu, Indiana University, Department of Physics, Bloomington, Indiana, United States
Rana Biswas
Affiliation:
biswas@scholarone.com, Iowa State University, Physics & Astronomy; Microelectronics Research Center, Ames, Iowa, United States
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Abstract

We describe a new class of plasmonic photonic crystal emitters integrated into a MEMS platform for high temperature-intensity, high speed, and high efficiency tuned emitting and sensing applications in the infrared. We exploit 2D organized metallo-dielectric surface structures for angular and spectral control of reflection, absorption and emission from surfaces in the infrared. We have built a FDTD model that incorporates complex frequency dependent properties and provides quantitative agreement with measured spectral data. High temperature materials and special fabrication techniques allow high temperature operation. This technology offers new solutions for spectral control with application in thermophotovoltaic (TPV) energy conversion. Built on a MEMS platform, for thermal isolation from the environment, these devices also modulate at high speed, opening new applications in spectroscopy, infrared imaging, and signaling. Demonstrated wafer-level vacuum sealing improves the wall plug efficiency dramatically. We describe device architecture and fabrication considerations for plasmonic photonic crystal structures which simultaneously act as emitters and sensors in a defined narrow waveband radiation. In particular, this combined capability opens new avenues for research for vital commercial applications such as environmental protection, household safety, bio-hazardous material identification, meteorology and industrial environments.

Type
Research Article
Copyright
Copyright © Materials Research Society 2009

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References

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