No CrossRef data available.
Article contents
Growth of BN Thin Films by Pulsed Laser Deposition
Published online by Cambridge University Press: 28 February 2011
Abstract
A new UHV system for pulsed laser deposition of materials is described, together with results from preliminary experiments for depositions of BN on Si. The system is designed to allow for in-situ diagnostics of the ablation plasma, as well as UHV preparation and characterization of clean sample substrates. The room temperature depositions of BN result in amorphous, B-rich films, whose particle content is a strong function of laser wavelength.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 1992