Skip to main content Accessibility help
×
Home
Hostname: page-component-78bd46657c-5628d Total loading time: 0.223 Render date: 2021-05-07T05:10:35.617Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": false, "newCiteModal": false, "newCitedByModal": true }

Film Thickness Effect on Tensile Properties and Microstructures of Submicron Aluminum Thin Films on Polyimide

Published online by Cambridge University Press:  15 February 2011

Y. S. Kang
Affiliation:
Center for Materials Science and Engineering, University of Texas at Austin, Austin, TX 78712
P. S. Ho
Affiliation:
Center for Materials Science and Engineering, University of Texas at Austin, Austin, TX 78712
R. Knipe
Affiliation:
Texas Instruments Inc., Dallas, TX 75265
J. Tregilgas
Affiliation:
Texas Instruments Inc., Dallas, TX 75265
Get access

Abstract

The mechanical behavior of the metal film on a polymer substrate becomes an important issue in microelectronics metallization. The metal/polymer structure is also useful to investigate the deformation behavior of very thin free-standing metal film since the flexible polymer serves as a deformable substrate. The tensile force-elongation curves have been measured using a microtensile tester for aluminum thin films, deposited on a PMDA-ODA polyimide film, in the thickness range from 60 rum to 480 nm. The stress-strain curves for aluminum films were constructed by subtracting these curves with polyimide curves measured separately. Tensile strength increases linearly with decreasing film thickness from 196 MPa to 408 MPa within the film thickness range studied. This is in good agreement with the published data for free-standing aluminum films in the same thickness range. The measured Young's modulus is lower than the bulk modulus and exhibits no systematic dependence on the film thickness. The microstructures of aluminum films have been examined using a transmission electron microscope (TEM). These films posses the (111)-textured columnar grain structures. Grain sizes exhibit log-normal distributions and the mean grain size increases monotonically with the film thickness. An attempt is made to evaluate the effect of film thickness and grain size on the strength of aluminum thin film and the result is discussed.

Type
Research Article
Copyright
Copyright © Materials Research Society 1997

Access options

Get access to the full version of this content by using one of the access options below.

References

[1] Hornbeck, L.J., SPIE Critical Reviews 1150, 86 (1989)Google Scholar
[2] Mearini, G.T. and Hoffmnan, R.W., J. Electron. Mat. 22, 623 (1993)CrossRefGoogle Scholar
[3] Hoffman, R.W., Mat. Res. Soc. Symp. Proc. 130, 295 (1989)CrossRefGoogle Scholar
[4] Volkert, C.A., Alofs, C.F., and Liefting, J.R., J. Mat. Res. 9, 1147 (1994)CrossRefGoogle Scholar
[5] Venkatraman, R. and Bravman, J.C., J. Mat. Res. 7, 2040 (1992)CrossRefGoogle Scholar
[6] Venkatraman, R., Bravman, J.C., Nix, W.D., Davies, P.W., Flinn, P.A., and Fraser, D.B., J. Electron. Mat. 19, 1231 (1990)CrossRefGoogle Scholar
[7] Kuan, T.S. and Murakami, M., Metall. Trans. A 13A, 383 (1982)CrossRefGoogle Scholar
[8] Bartha, J.W., Hahn, P.O., LeGoues, F., and Ho, P.S., J. Vac. Sci. Technol. A 3, 1390 (1985)CrossRefGoogle Scholar
[9] Chaudhari, P., Phil. Mag. 39, 507 (1979)CrossRefGoogle Scholar
[10] Thompson, C.V., J. Mat. Res. 8, 237 (1993)CrossRefGoogle Scholar

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Film Thickness Effect on Tensile Properties and Microstructures of Submicron Aluminum Thin Films on Polyimide
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Film Thickness Effect on Tensile Properties and Microstructures of Submicron Aluminum Thin Films on Polyimide
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Film Thickness Effect on Tensile Properties and Microstructures of Submicron Aluminum Thin Films on Polyimide
Available formats
×
×

Reply to: Submit a response


Your details


Conflicting interests

Do you have any conflicting interests? *