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Fabrication and Atomistic Modeling of Ion-Etch Nanostructures on Substrates

Published online by Cambridge University Press:  01 February 2011

Maria Stepanova
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta, Edmonton, Alberta, T6G 2V4, Canada
Steven K. Dew
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta, Edmonton, Alberta, T6G 2V4, Canada
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Abstract

We have implemented and investigated numerically a new process to fabricate self-organized metal networks and lines on non-metallic substrates. We have deposited a thin film of Cu on silicon and glass substrates and etched the film by a 1 keV-energy Ar beam. Due to the kinetic mechanism known as sputter instability, nanosize metal patterns self-organize on the substrate at the stage when the etched surface reaches the metal/substrate interface. By numerical simulations, we have investigated the mechanism and control factors for the process.

Type
Research Article
Copyright
Copyright © Materials Research Society 2005

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