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Electron Microscopy Study of the Influence of the Adhesion Layer for Pt Electrode on the Microstructure of Sol-Gel Crystallized Pzt

Published online by Cambridge University Press:  21 February 2011

Vidya Kaushik
Affiliation:
Motorola Inc., Semiconductor Products Sector, Austin, Texas 78721
Papu Maniar
Affiliation:
Motorola Inc., Semiconductor Products Sector, Austin, Texas 78721
Andrew Campbell
Affiliation:
Motorola Inc., Semiconductor Products Sector, Austin, Texas 78721
Robert Jones
Affiliation:
Motorola Inc., Semiconductor Products Sector, Austin, Texas 78721
Reza Moazzami
Affiliation:
Motorola Inc., Semiconductor Products Sector, Austin, Texas 78721
C. Joseph Mogab
Affiliation:
Motorola Inc., Semiconductor Products Sector, Austin, Texas 78721
Robert Hance
Affiliation:
Motorola Inc., Semiconductor Products Sector, Austin, Texas 78721
Ronald Pyle
Affiliation:
Motorola Inc., Semiconductor Products Sector, Austin, Texas 78721
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Abstract

PZT ferroelectric capacitors are commonly fabricated using Pt electrodes. Crystallization in an oxygen ambient of sol-gel deposited PZT films is influenced by the nature of the adhesion layer used for the Pt electrode. Here we report results of the TEM investigation of the microstructures of PZT crystallized on Pt/Ti and Pt/TiO2 substrates. PZT films on either substrate show a two-phase microstructure consisting of larger perovskite grains and finegrained (<3nm) pyrochlore matrix. The perovskite grains are dense, free of any porosity and HRTEM shows the observed domains to be 90° <101> twins. EDS spectra detect a lower Pb/Ti ratio for the pyrochlore matrix compared to the perovskite grains. Differences between the two substrates consist of the perovskite to pyrochlore ratio and more importantly the perovskite grain size.

Type
Research Article
Copyright
Copyright © Materials Research Society 1993

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References

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Electron Microscopy Study of the Influence of the Adhesion Layer for Pt Electrode on the Microstructure of Sol-Gel Crystallized Pzt
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Electron Microscopy Study of the Influence of the Adhesion Layer for Pt Electrode on the Microstructure of Sol-Gel Crystallized Pzt
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