Skip to main content Accessibility help
×
Home
Hostname: page-component-79b67bcb76-pclkk Total loading time: 0.313 Render date: 2021-05-16T22:37:53.552Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": false, "newCiteModal": false, "newCitedByModal": true, "newEcommerce": true }

Electron Emission Properties of Si Field Emitter Arrays Coated With Nanocrystalline Diamond From Fullerene Precursors

Published online by Cambridge University Press:  10 February 2011

T. G. McCauley
Affiliation:
Materials Science and Chemistry Divisions, Argonne National Laboratory, Argonne, IL 60439
T. D. Corrigan
Affiliation:
Materials Science and Chemistry Divisions, Argonne National Laboratory, Argonne, IL 60439 Department of Materials Science and Engineering, Northwestern University, Evanston, IL 60208
A. R. Krauss
Affiliation:
Materials Science and Chemistry Divisions, Argonne National Laboratory, Argonne, IL 60439
O. Auciello
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne, IL 60439
D. Zhou
Affiliation:
Materials Science and Chemistry Divisions, Argonne National Laboratory, Argonne, IL 60439
D. M. Gruen
Affiliation:
Materials Science and Chemistry Divisions, Argonne National Laboratory, Argonne, IL 60439
D. Temple
Affiliation:
Electronics Technology Division, MCNC, Research Triangle Park, NC 27709
R.P.H. Chang
Affiliation:
Department of Materials Science and Engineering, Northwestern University, Evanston, IL 60208
S. English
Affiliation:
Department of Physics, North Carolina State University, Raleigh, NC 27695
R. J. Nemanich
Affiliation:
Department of Physics, North Carolina State University, Raleigh, NC 27695
Get access

Abstract

In this paper, we report on a substantial lowering of the threshold field for electron field emission from Si field emitter arrays (FEA), which have been coated with a thin layer of nanocrystalline diamond by microwave plasma-assisted chemical vapor deposition (MPCVD) from fullerene (C60) and methane (CH4) precursors. The field emission characteristics were investigated and the emission sites imaged using photoelectron emission microscopy (PEEM). Electron emission from these Si FEAs coated with nanocrystalline diamond was observed at threshold fields as low as 3 V/μm, with effective work functions as low as 0.59 eV.

Type
Research Article
Copyright
Copyright © Materials Research Society 1998

Access options

Get access to the full version of this content by using one of the access options below.

References

1. Talin, A.A., Felter, T.E., and Devine, D.J., J. Vac. Sci. Technol. B 13(2), 448 (1995).CrossRefGoogle Scholar
2. Brandes, G.R., in Handbook of Industrial Diamonds and Diamond Films, ed. by Prelas, M. A., Popovici, G., and Bigelow, L.K. (Marcel Dekker, New York, 1998), pp. 11031127.Google Scholar
3. Cheng, H.C., Ku, T.K., Hsieh, B.B., Chen, S.H., Leu, S.Y., Wang, C.C., Chen, C.F., Hsieh, I.J., and Huang, J.C., Jpn. J. Appl. Phys. 34(I, 12B), 6926 (1995).CrossRefGoogle Scholar
4. Givargizov, E.I., Zhirnov, V.V., Stepanov, A.N., Plekhanov, P.S., and Kozlov, R.I., Appl. Surf. Sci. 94–5, 117 (1996).CrossRefGoogle Scholar
5. Givargizov, E.I., Aksenova, L.L., Kuznetsov, A.V., Plekhanov, P.S., Rakova, E.V., Stepanova, A.N., Zhirnov, V.V., and Nordine, P.C., Diara. Relat. Mat., 5(9), 938 (1996).CrossRefGoogle Scholar
6. Gruen, D.M., Liu, S., Krauss, A.R., and Pan, X., J. Appl. Phys. 75(3), 1758 (1994).CrossRefGoogle Scholar
7. Gruen, D.M., Zuiker, C.D., Krauss, A.R., and Pan, X., J. Vac. Sci. Technol. A 13(3), 1628 (1995).CrossRefGoogle Scholar
8. Unertl, W.N. and Kordesch, M.E., in Handbook of Surface Science Vol. 1: Physical Structure, ed. by Unertl, W.N. (Elsevier, Amsterdam, 1996), pp. 361421.Google Scholar

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Electron Emission Properties of Si Field Emitter Arrays Coated With Nanocrystalline Diamond From Fullerene Precursors
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Electron Emission Properties of Si Field Emitter Arrays Coated With Nanocrystalline Diamond From Fullerene Precursors
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Electron Emission Properties of Si Field Emitter Arrays Coated With Nanocrystalline Diamond From Fullerene Precursors
Available formats
×
×

Reply to: Submit a response


Your details


Conflicting interests

Do you have any conflicting interests? *