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Electrochemical Deposition of Platinum Interconnects on Flexible Biocompatible Substrates

Published online by Cambridge University Press:  14 January 2014

A. Radisic
Affiliation:
imec, Kapeldreef 75, Leuven, Belgium
B. M. Morcos
Affiliation:
imec, Kapeldreef 75, Leuven, Belgium KACST-Intel Consortium CENA, Riyadh, Saudi Arabia Chemistry Department, Faculty of Science, Alexandria University, Egypt
M. Op de Beeck
Affiliation:
imec, Kapeldreef 75, Leuven, Belgium
J. M. O’Callaghan
Affiliation:
imec, Kapeldreef 75, Leuven, Belgium
C. Van Hoof
Affiliation:
imec, Kapeldreef 75, Leuven, Belgium
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Abstract

We explored the use of galvanostatic electrochemical deposition of Pt for cost-effective fabrication of interconnects in flexible implantable bio-medical devices. Initial studies were done on coupons diced from 200 mm Si wafers coated with PVD TiN. Based on the physical and chemical properties of the electrodeposited Pt films, optimal conditions were chosen for through-mask plating of centimeters long Pt lines on flexible, medical grade, releasable polyimide layers. Possibility for further up-scaling was considered with special emphasis on high throughput manufacturing of Pt interconnects with good adhesion to TiN/flexible substrates, low impurity content and resistivity, and acceptable roughness and uniformity.

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Articles
Copyright
Copyright © Materials Research Society 2014 

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References

Cowley, A. and Woodward, B., Platinum Metals Review, 55, 98 (2011).CrossRef
Op de Beeck, M., O’Callaghan, J., Qian, K., Morcos, B.M., Radisic, A., Malachowski, K., Amira, M.F., Hoof, C.V., in Proceedings of the IMAPS San Diego, CA, USA, 45 215 (2012).
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Radisic, A., Morcos, B. M., Op de Beeck, M., O’Callaghan, J. M., Van Hoof, C., Microelectron. Eng. (2013), http://dx.doi.org/10.1016/j.mee.2013.07.004.
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