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Electrochemical Corrosion Inhibition System for Photoresist Stripper for New Copper FPD Manufacturing

Published online by Cambridge University Press:  01 February 2011

Seiji Inaoka
Affiliation:
seiji.inaoka@tycohealthcare.com, Tyco Healthcare, Mallinckrodt Baker, 1904 JT Baker Way, Bldg 122, Phillipsburg, NJ, 08865, United States
Sang In Kim
Affiliation:
si.kim@tycohealth.co.kr, Tyco Healthcare, Mallinckrodt Baker, Pyeongtaek, N/A, Korea, Republic of
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Abstract

Development of photoresist stripper with copper compatibility is challenging as conventional corrosion inhibitors do not protect the metal as expected. Copper corrosion inhibition mechanism of newly developed photoresist stripper is proposed that significantly reduces copper corrosion with small amount of corrosion inhibitor.

Type
Research Article
Copyright
Copyright © Materials Research Society 2007

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References

REFERENCES

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