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Effects of Surface Constraints on Stresses in Heteroepitaxial Films Grown on Compliant Substrates

Published online by Cambridge University Press:  21 March 2011

Zhaohua Feng
Affiliation:
Computational Mechanics Center, Mechanical Engineering Department
Edward G. Lovell
Affiliation:
Computational Mechanics Center, Mechanical Engineering Department
Roxann L. Engelstad
Affiliation:
Computational Mechanics Center, Mechanical Engineering Department
Thomas F. Kuech
Affiliation:
Department of Chemical Engineering University of Wisconsin, Madison, WI 53706, U.S.A.
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Abstract

As films heteroepitaxially grow on substrates, lattice mismatch strain at the interfaces causes stresses in the films and substrates. These stresses can have deleterious effects on film quality. To facilitate an understanding of defect production and control during growth of films on compliant substrates, transient finite element models were developed to simulate the complete mechanical stress and strain fields. Effects of constraints between the template and handle wafer on the film stresses were examined. The investigation showed that different types of constraints caused stress variations over a large range. Other factors affecting the stresses, such as lattice mismatch strain, wafer radius, film and template thickness, were also assessed.

Type
Research Article
Copyright
Copyright © Materials Research Society 2002

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References

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Effects of Surface Constraints on Stresses in Heteroepitaxial Films Grown on Compliant Substrates
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