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The Effect of Gas-Surface Interactions on Laser-Generated BaTiO3 Plumes

Published online by Cambridge University Press:  15 February 2011

Albert J. Paul
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899
John W. Hastie
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899
David W. Bonnell
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899
Peter K. Schenck
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899
Mark D. Vaudin
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899
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Abstract

Two models, based on hydrodynamic and Direct Simulation Monte Carlo approaches, have been investigated for the simulation of species fluxes arriving at substrates during pulsed laser deposition of thin films. The models are assessed in light of the results of mass spectrometric and optical imaging observations of the plume. Model predictions of film composition are compared with the results of microscopic compositional analysis across a deposited BaTiO3 film. The spatial distributions of the relative abundance of total Ba and Ti were a particular focus of this study, with the latter model giving the best agreement with experiment. The Monte Carlo simulation results indicate that the incoming concentration ratio of total Ba to Ti, across the substrate surface, is strongly modified by gas collisions within a compressed region that forms between the infalling plume and the substrate surface, and also by momentum exchange (scattering) between the lighter plume species and the added background gas.

Type
Research Article
Copyright
Copyright © Materials Research Society 1998

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