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The Effect of Ar+ Ion Implantation on the Impact-Abrasive Wear Property of Cu-Polyimide System

Published online by Cambridge University Press:  21 February 2011

S. K. Koh
Affiliation:
Rutgers University, Department of Mechanics and Materials Science, Piscataway N.J.08855-0909
K. D. Pae
Affiliation:
Rutgers University, Department of Mechanics and Materials Science, Piscataway N.J.08855-0909
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Abstract

A thin Cu film(400 Å) was deposited on a smooth polyimide(PI) substrate. Ar+ ion implantation onto the Cu/PI film has been shown to mix Cu and PI and to modify the impact-abrasive wear property. Ar+ ions with energies of 200 keV, and dosage between 1015 to 4×1016 ions/cm2 were used. The surface analyses were carried out with RBS, X-ray and Optical Microscope. The wear properties of the Cu-PI system were determined by a newly constructed Impact-Abrasive Wear Tester. An X-ray diffraction study shows an increase in Cu( 111 )peak with Ar+ ion dosage. The wear property was found to be a function of ion energy, ion dosage, crystallinity of Cu, the amount of mixing of Cu and PI, and the damage of PI substrate due to ion implantation.

Type
Research Article
Copyright
Copyright © Materials Research Society 1988

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References

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