No CrossRef data available.
Article contents
Dynamics of Microstructure in the Early Stages of Ion Beam Assisted Film Growth
Published online by Cambridge University Press: 21 February 2011
Abstract
Recent progress in low energy ion-surface interactions, and the early stages of ion-assisted epitaxy of semiconductor thin films is described. Advances in three areas are discussed: dynamics of displacements and defect incorporation, nucleation mechanisms, and the use of ion bombardment to modify epitaxial growth kinetics in a truly surface-selective manner.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 1992