Skip to main content Accessibility help
×
Home
Hostname: page-component-888d5979f-bkf9v Total loading time: 0.223 Render date: 2021-10-26T13:08:17.517Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": true, "newCiteModal": false, "newCitedByModal": true, "newEcommerce": true, "newUsageEvents": true }

Dielectric-barrier discharge plasma source and its application to synthesis of diamond like carbon films

Published online by Cambridge University Press:  01 February 2011

Xinpeng Wang
Affiliation:
david011608@hotmail.com, University of Puerto Rico, Department of Physics, San Juan, 00931, Puerto Rico
Xiaoliang Tang
Affiliation:
tangxiaoliangdhu@163.com, Donghua University, Physics Department, Shanghai, 201620, China, People's Republic of
Peter Xianping Feng
Affiliation:
pfeng@cnnet.upr.edu, University of Puerto Rico, Departmen of Physics, PO Box 23343, Dept of Physics,, Univ. of Puerto Rico, Rio Piedras Camp., San Juan, 00931, Puerto Rico, 787-764-0000, ext. 2719
Get access

Abstract

Dielectric barrier discharge plasma sources have been studied and used for syntheses of diamond like carbon thin films. The plasma electrical properties under different gases concentrations and pressures were diagnosed. Based on the results of characterizations, dielectric barrier discharge plasma at different methane-hydrogen-argon gas ratios was used to synthesize large area of diamond like carbon films. Experimental data indicate that only at argon concentration equal to or less than 75% diamond like carbon film fabrication could be accomplished, which has been confirmed based on the Raman spectra and their hardness measurements, whereas high argon content during deposition would result in graphite type of thin films.

Type
Research Article
Copyright
Copyright © Materials Research Society 2008

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Kogoma, M., Okazaki, S.., Inomata, T., Contr. Papers of HAKONE VI, Cork, Ireland, 31st. Aug.–2nd. Sept., 8387 (1998)Google Scholar
2. Li, Z., Feng, P. X., Yan, Y. C., and Xie, H. K., J. Donghua Univ. 30, 21 (2004)Google Scholar
3. Klages, C.P., Höpfner, K., Kläke, N. and Thyen, R., “Functional group retention in DBD-based plasma polymerization” klages@ist.fhg.de, SVC Technical Conference 2000,Google Scholar
4. Liu, H. Z., Cui, N. Y., Brown, N. M. D. and Meenan, B. J., Surf. Coat. Technol. 185, 311 (2004)CrossRefGoogle Scholar
5. Gessner, C., Bartels, V., Betker, T., Matucha, U., Penache, C. and Klages, C. P., Thin solid films 459, 118 (2004)CrossRefGoogle Scholar
6. Zhang, R. B., Yan, W., Jie, L., Li, G. F., Li, T. F. and Zhou, Z. G., J. Adv. Oxid. Technol. 7(2), 172 (2004)Google Scholar
7. Oehr, C., Müller, M., Elkin, B., Hegemann, D. and Vohrer, U., Surf. Coat. Technol., 25, 116119 (1999)Google Scholar
8. Kim, Y., Hong, S. H., Cha, N. S., Song, Y. H. and Kim, S. J., J. Adv. Oxid. Technol. 6(1), 17 (2003)Google Scholar
9. Williamson, J. M., Bletzinger, P. and Ganguly, B. N., J. Phys. D Appl. Phys. 37(12), 1658 (2004)CrossRefGoogle Scholar
10. Uyama, Y., Kato, K., and Ikada, Y., Adv. Polym. Sci. 137, 139 (1998)CrossRefGoogle Scholar
11. Liu, D. P., Yu, S. J., Ma, T. C., Song, Z. M. and Yang, X. F., Jpn. J. Appl. Phys. Part 1-Regular papers, Short notes & Review papers 39(6A), 3359 (2000)CrossRefGoogle Scholar
12. Ou, Q. R., Meng, Y. D., Xu, X., Shu, X. S. and Ren, Z. X., Chinese Phys Lett 21(7), 1317 (2004)Google Scholar
13. Liu, D. P., Benstetter, G., Liu, Y. H., Yang, X. F., Yu, S. J. and Ma, T. C., New Diam. Front. C. Tec. (4), 191 (2003)Google Scholar

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Dielectric-barrier discharge plasma source and its application to synthesis of diamond like carbon films
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Dielectric-barrier discharge plasma source and its application to synthesis of diamond like carbon films
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Dielectric-barrier discharge plasma source and its application to synthesis of diamond like carbon films
Available formats
×
×

Reply to: Submit a response

Please enter your response.

Your details

Please enter a valid email address.

Conflicting interests

Do you have any conflicting interests? *