Skip to main content Accessibility help
×
Home
Hostname: page-component-568f69f84b-h2zp4 Total loading time: 0.344 Render date: 2021-09-17T23:41:25.624Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": true, "newCiteModal": false, "newCitedByModal": true, "newEcommerce": true, "newUsageEvents": true }

Characterization of Polysilicon Films by Raman Spectroscopy and Transmission Electron Microscopy: a Comparative Study*

Published online by Cambridge University Press:  22 February 2011

David R. Tallant
Affiliation:
Sandia National Laboratories, Albuquerque, NM;
Thomas J. Headley
Affiliation:
Sandia National Laboratories, Albuquerque, NM;
John W. Medernach
Affiliation:
Sandia National Laboratories, Albuquerque, NM;
Franz Geyling
Affiliation:
SEMATECH, Austin, TX
Get access

Abstract

Samples of chemically-vapor-deposited sub-micrometer-thick films of polysilicon were analyzed by transmission electron microscopy (TEM) in cross-section and by Raman spectroscopy with illumination at their surface. TEM and Raman spectroscopy both find varying amounts of polycrystalline and amorphous silicon in the wafers. Raman spectra obtained using blue, green and red excitation wavelengths to vary the Raman sampling depth are compared with TEM crosssections of these films. Some films have Raman spectra with a band near 497 cm−1, corresponding to numerous nanometer-scale faulted regions in the TEM micrographs.

Type
Research Article
Copyright
Copyright © Materials Research Society 1994

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Footnotes

*

This work was performed at Sandia National Laboratories, which is operated for the U.S. Department of Energy under contract number DE-AC04-94AL85000, and at the Semiconductor Equipment Technology Center (SETEC) of Sandia National Laboratories, Albuquerque, New Mexico 87185 and Livermore, California 94550 for SEMATECH under CRADA SC92-1082.

References

1. Pollack, F. H., Test and Measurement World, pp. 210 (May, 1985)Google Scholar
2. Aspnes, D. E. and Studna, A. A., Phys. Rev. B, 27(2), 9851009 (1983).CrossRefGoogle Scholar
3. Bosch, M. A. and Lemons, R. A., Appl. Phys. Lett. 40(2), 166168 (1982).CrossRefGoogle Scholar
4. Olego, D. J. and Baumgart, H., J. Appl. Phys. 63(8), 26692673 (1988).CrossRefGoogle Scholar

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Characterization of Polysilicon Films by Raman Spectroscopy and Transmission Electron Microscopy: a Comparative Study*
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Characterization of Polysilicon Films by Raman Spectroscopy and Transmission Electron Microscopy: a Comparative Study*
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Characterization of Polysilicon Films by Raman Spectroscopy and Transmission Electron Microscopy: a Comparative Study*
Available formats
×
×

Reply to: Submit a response

Please enter your response.

Your details

Please enter a valid email address.

Conflicting interests

Do you have any conflicting interests? *