Skip to main content Accessibility help
×
Home
Hostname: page-component-8bbf57454-lngfr Total loading time: 0.183 Render date: 2022-01-23T04:39:01.893Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": true, "newCiteModal": false, "newCitedByModal": true, "newEcommerce": true, "newUsageEvents": true }

Carrier lifetime, diffusion length and mobility in (100) CVD diamond samples pre-treated in an O2/H2-plasma

Published online by Cambridge University Press:  02 March 2011

W. Deferme
Affiliation:
Hasselt University, Institute for Materials Research (IMO), Diepenbeek, Belgium
K. Haenen
Affiliation:
Hasselt University, Institute for Materials Research (IMO), Diepenbeek, Belgium IMEC vzw, Division IMOMEC, Diepenbeek, Belgium
M. Nesládek
Affiliation:
Hasselt University, Institute for Materials Research (IMO), Diepenbeek, Belgium IMEC vzw, Division IMOMEC, Diepenbeek, Belgium
T. Malinauskas
Affiliation:
Vilnius University, Institute of Applied Research, Vilnius, Lithuania
L. Lubys
Affiliation:
Vilnius University, Institute of Applied Research, Vilnius, Lithuania
K. Jarašiūnas
Affiliation:
Vilnius University, Institute of Applied Research, Vilnius, Lithuania
Get access

Abstract

In this article, (100) Ib diamond substrates are pre-treated for different durations in an O2/H2-plasma, influencing the etching of defects like unepitaxial crystals, flat top hillocks, and pyramidal hillocks [1-3]. Such procedure is used to prevent those to incorporate into the ~ 100μm thick CVD diamond film, which is subsequently grown on top. While the surface morphology and structure of substrates and films are studied by SEM, the time-resolved Light-Induced Transient Grating (LITG) technique provides information on the excess carrier parameters close to the front surface of the grown layers. This technique is particularly useful as it does not requires a separation of the CVD film from its substrate. It will be shown that O2/H2-plasma treatments of more than 150 minutes but less than 240 minutes largely reduce the incorporation of defects in the bulk of the grown film. This, in turn, influences the carrier dynamics as measured by LITG, but also the surface roughness and growth rate as shown by SEM.

Type
Research Article
Copyright
Copyright © Materials Research Society 2011

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Tallaire, A., Kasu, M., Ueda, K. and Makimoto, T., Diamond Rel. Mater. 17 (2008), 60 CrossRefGoogle Scholar
2. Achard, J., Silva, F., Brinza, O., Bonnin, X., Mille, V., Issaoui, R., Kasu, M. and Gicquel, A., phys. stat. sol. (a) 206/9 (2009), 1949 CrossRefGoogle Scholar
3. Silva, F., Achard, J., Bonnin, X., Michau, A., Tallaire, A., Brinza, O. and Gicquel, A., phys. stat. sol. (a) 203 (2006), 3049 CrossRefGoogle Scholar
4. Bogdan, G., Nesládek, M., D’Haen, J., Maes, J., Moshchalkov, V.V., Haenen, K. and D’Olieslaeger, M., phys. stat. sol. (a) 202/11 (2005), 2066 CrossRefGoogle Scholar
5. Silva, F., Achard, J., Bonnin, X., Brinza, O., Michau, A., Secroun, A., De Corte, K., Felton, S., Newton, M. and Gicquel, A., Diamond Rel. Mater. 17 (2008), 1067 CrossRefGoogle Scholar
6. Teraji, T., Hamada, M., Wada, H., Yamamoto, M., Ito, T., Diamond Rel. Mater. 14 (2005), 1747 10.1016/j.diamond.2005.06.021CrossRefGoogle Scholar
7. Tallaire, A., Achard, J., Silva, F., Sussmann, R.S., Gicquel, A. and Rzepka, E., phys. stat. sol. 201 (2004), 2419 CrossRefGoogle Scholar
8. Malinauskas, T., Jarasiunas, K., Ivakin, E., Ralchenko, V., Gontar, A. and Ivakhnenko, S., Diamond Rel. Mater. 17 (2008), 1212 CrossRefGoogle Scholar
9. Malinauskas, T., Jarasiunas, K., Ivakin, E., Tranchant, N. and . Nesladek, M., phys. stat. sol., 207 (2010), 2058 10.1002/pssa.201000100CrossRefGoogle Scholar
10. Kadys, A., Sudzius, M., Jarasiunas, K., Fochuk, O., Feychuk, O., Hellin, M.L. and . Verstraeten, D., phys. stat. sol. 244 (2007), 1675 10.1002/pssb.200675149CrossRefGoogle Scholar
11. Malinauskas, T., Aleksiejunas, R., Jarasiunas, K., Beaumont, B., Gibart, P., Kakanakova-Georgieva, A., Janzen, E., Gogova, D., Monemar, B. and Heuken, M., Journal of Crystal Growth 300 (2007), 223 CrossRefGoogle Scholar
12. Deferme, W., Bogdan, A., Bogdan, G., Haenen, K., De Ceuninck, W., Nesládek, M., phys. stat. sol. 204/9 (2007), 3017 10.1002/pssa.200776343CrossRefGoogle Scholar
13. Isberg, J., Hammersberg, J., Twitchen, D.J. and Whitehead, A.J., Diamond Rel. Mater. 13 (2004), 320 CrossRefGoogle Scholar
14. Fujita, F., Oshiki, Y., Kaneko, J.H., Homma, A., Tsuji, K., Meguro, K., Yamamoto, Y., Imai, T., Watanabe, H., Teraji, T., Kawamura, S. and Furusaka, M., Diamond Rel. Mater. 15 (2006), 1921 CrossRefGoogle Scholar

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Carrier lifetime, diffusion length and mobility in (100) CVD diamond samples pre-treated in an O2/H2-plasma
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Carrier lifetime, diffusion length and mobility in (100) CVD diamond samples pre-treated in an O2/H2-plasma
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Carrier lifetime, diffusion length and mobility in (100) CVD diamond samples pre-treated in an O2/H2-plasma
Available formats
×
×

Reply to: Submit a response

Please enter your response.

Your details

Please enter a valid email address.

Conflicting interests

Do you have any conflicting interests? *