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Brllouin Light Scattering on Diamond and Diamondlike Carbon Films

Published online by Cambridge University Press:  22 February 2011

X. Jiang
X. Jiang*
Affiliation:
Fraunhofer-Institut für Schicht- und Oberflächentechnik (FhG-IST), Vogt-Kölln-Str. 30, P.O. Box 540 645, W-2000 Hamburg 54, Germany
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Abstract

The set of acoustic mode frequencies associated with elastic constants has been determined from Brillouin light scattering measurements on carbon films of different crystallographic phases, i.e. on chemical vapour deposited (CVD) polycrystalline diamond, polycrystalline graphite, and amorphous carbon films (a-C:H). From the measured sound velocities of the acoustic phonons Young's moduli, shear moduli, and bulk moduli of the films were calculated. On a-C:H films depth-sensing indentation tests were performed. The values of ultramicrohardness of these films are, therefore, also reported.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 239: Symposium D – Thin Films: Stresses and Mechanical Properties III , 1991 , 269
Copyright
Copyright © Materials Research Society 1992

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References

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