Skip to main content Accessibility help
×
Home
Hostname: page-component-888d5979f-jgqf9 Total loading time: 0.303 Render date: 2021-10-25T21:26:40.667Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": true, "newCiteModal": false, "newCitedByModal": true, "newEcommerce": true, "newUsageEvents": true }

Assessment Of GaInAs/GaInAsP Interdiffusion Profiles Obtained Using Stem-Edx And Hrem

Published online by Cambridge University Press:  15 February 2011

R E Mallard
Affiliation:
Department of Materials, University of Oxford, Parks Road, Oxford, OXI 3PH, UK BNR Europe Limited, London Road, Harlow, CM17 9NA, UK.
N J Long
Affiliation:
Department of Materials, University of Oxford, Parks Road, Oxford, OXI 3PH, UK BNR Europe Limited, London Road, Harlow, CM17 9NA, UK.
G R Booker
Affiliation:
Department of Materials, University of Oxford, Parks Road, Oxford, OXI 3PH, UK BNR Europe Limited, London Road, Harlow, CM17 9NA, UK.
E J Thrush
Affiliation:
Department of Materials, University of Oxford, Parks Road, Oxford, OXI 3PH, UK BNR Europe Limited, London Road, Harlow, CM17 9NA, UK.
K Scarrott
Affiliation:
Department of Materials, University of Oxford, Parks Road, Oxford, OXI 3PH, UK BNR Europe Limited, London Road, Harlow, CM17 9NA, UK.
Get access

Abstract

We report on an investigation into the interfacial structure of undoped GaInAs/GaInAsP multiple quantum wells grown by metalorganic chemical vapour deposition (MOCVD), which exhibit a pronounced blue shift in luminescence output upon in-situ thermal annealing at 750°C. Using a recently developed composition mapping technique based on the scanning transmission electron microscope (STEM) in conjunction with energy dispersive X-ray (EDX) analysis, the constituent element concentration profiles across the interdiffused multilayer interfaces are measured with a spatial resolution of less than 2nm and a precision of better than 2–3%. The accuracy of the analysis is significantly improved by employing stoichiometric normalisation factors which compensate for systematic errors due to electron channelling. The results showed that the interdiffusion follows a highly non-linear path due to the relatively fast diffusion of the group V species compared to that of the group III species. This implies an increase in the coherency strain in the multilayer, a result which is supported by five-crystal Xray diffraction analysis of the layers. The samples have also been examined by high resolution electron microscopy (HREM) under chemically sensitive imaging conditions. The analysis of the interfacial chemical profile using HREM must be performed under analysis conditions for which a known and unique relationship between image contrast and composition occurs. This condition may not be satisfied in cases in which more than two chemical constituents interdiffuse and the diffusivities of these elements are not equal, as a range of similar lattice fringe motifs across the interface, representing different “diffusion paths”, could occur. The complementary nature of information provided by HREM and STEM provides a means of resolving this ambiguity.

Type
Research Article
Copyright
Copyright © Materials Research Society 1993

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

(1) Mallard, R E, Thrush, E J, Martin, R W, Wong, S L, Nicholas, R J, Pritchard, R E, Hamilton, B, Long, N J, Galloway, S A, Chew, A, Sykes, D E, Thompson, J, Scarrott, K, Jowett, J M, Satzke, K, Norman, A G, and Booker, G R, Semicond Sci Tech, (1992), in pressGoogle Scholar
(2) Stadelmann, P A, Ultramicroscopy, 21, 131 (1987)CrossRefGoogle Scholar
(3) Long, N J, Norman, A G, Petford-Long, A K, Butler, B R, Cureton, C G, Booker, G R, and Thrush, E J, Proc Oxford Conf Micros Semicon Mater, IOPCS 117, 69 (1991)Google Scholar
(4) Long, N J and Glaisher, R W, Proc EMAG, IOPCS 98, 277 (1989)Google Scholar
(5) Nakashima, K, Kawaguchi, Y, Kawamura, Y, Imamura, Y, and Asahi, H, Jpn J Appl Phys, 26, L1620 (1988)CrossRefGoogle Scholar
(6) Razeghi, M, Acher, O and Launay, F, Semicon Sci Tech, 2, 793 (1987)CrossRefGoogle Scholar
(7) Ourmazd, A, Baumann, F H, Bode, M, and Kim, Y, Ultramicroscopy, 34, 237 (1990)CrossRefGoogle Scholar
(8) Mallard, R E, Feuillet, G, Jouneau, P-H, Proc Oxford Conf Micros Semicon Mater, IOPCS 117, 17 (1991)Google Scholar

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Assessment Of GaInAs/GaInAsP Interdiffusion Profiles Obtained Using Stem-Edx And Hrem
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Assessment Of GaInAs/GaInAsP Interdiffusion Profiles Obtained Using Stem-Edx And Hrem
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Assessment Of GaInAs/GaInAsP Interdiffusion Profiles Obtained Using Stem-Edx And Hrem
Available formats
×
×

Reply to: Submit a response

Please enter your response.

Your details

Please enter a valid email address.

Conflicting interests

Do you have any conflicting interests? *