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Ar+ Implantation Effects on Polycrystalline Thin Films

Published online by Cambridge University Press:  15 February 2011

J. H. Lee
Affiliation:
LCD R&D 2, ‘Samsung Electronics Co., Kiheung, Yongin-Gun, Kyungki-Do, 449-900, Korea
C. W. Hwang
Affiliation:
LCD R&D 2, ‘Samsung Electronics Co., Kiheung, Yongin-Gun, Kyungki-Do, 449-900, Korea
J. E. Shin
Affiliation:
LCD R&D 2, ‘Samsung Electronics Co., Kiheung, Yongin-Gun, Kyungki-Do, 449-900, Korea
Y. S. Jin
Affiliation:
LCD R&D 2, ‘Samsung Electronics Co., Kiheung, Yongin-Gun, Kyungki-Do, 449-900, Korea
S. B. Mah
Affiliation:
LCD R&D 2, ‘Samsung Electronics Co., Kiheung, Yongin-Gun, Kyungki-Do, 449-900, Korea
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Abstract

The solid phase crystallization behavior of argon ion (Ar+) implanted very thin polycrystalline silicon (poly-Si) films has been investigated. Poly-Si films of 500Å thickness were deposited at 625°C by low pressure chemical vapor deposition (LPCVD). The films were amorphized by Ar+ implantation with 7 ° tilt angle. The amount of ions implanted was varied from 2.0 × 1013 cm-2 to 1.2 × 1015 cm-2 and the acceleration voltages from 40KeV to 120KeV. The films were recrystallized by furnace annealing at 580°C for 48 hours in N2 atmosphere, followed by 1000°C annealing The crystallinity of the recrystallized Si films and the distribution of the argon atoms in the film were investigated. It was found that the crystallinity strongly depended on the Ar+ implantation dose. The average grain size of Ar+ implanted film was about 0.25μm, which was smaller than that of Si+ implanted film of the same dose, 0.45μm. Ar atoms retarded the grain growth rate during the annealing process and the excess Ar atoms in Si films were segregated at the surface of silicon films after 1000°C annealing Poly-Si thin film transistors (TFTs) were fabricated at high temperature using Ar+ implantation technique. Remarkable electrical characteristics (Ids- Vgs) were obtained such as an electron mobility of 35 cm2/V.s, which was attributed to the enhancement of crystallinity by Ar+ implantation. But, segregated Ar atoms near the interface would give rise to structural deformation and crystalline defects which can act as the scattering and’ trapping centers for carriers.

Type
Research Article
Copyright
Copyright © Materials Research Society 1996

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References

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