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Application of a Dual-spectral-range, Divergent-beam Spectroscopic Ellipsometer for High-Speed Mapping of Large-area, Laterally-inhomogeneous, Photovoltaic Multilayers

Published online by Cambridge University Press:  20 June 2011

M. Fried
Affiliation:
Res. Inst. for Technical Physics & Materials Science (MFA) H-1525 Budapest, POB 49, Hungary
G. Juhasz
Affiliation:
Res. Inst. for Technical Physics & Materials Science (MFA) H-1525 Budapest, POB 49, Hungary
C. Major
Affiliation:
Res. Inst. for Technical Physics & Materials Science (MFA) H-1525 Budapest, POB 49, Hungary
A. Nemeth
Affiliation:
Res. Inst. for Technical Physics & Materials Science (MFA) H-1525 Budapest, POB 49, Hungary
P. Petrik
Affiliation:
Res. Inst. for Technical Physics & Materials Science (MFA) H-1525 Budapest, POB 49, Hungary
O. Polgar
Affiliation:
Res. Inst. for Technical Physics & Materials Science (MFA) H-1525 Budapest, POB 49, Hungary
C. Salupo
Affiliation:
Res. Inst. for Technical Physics & Materials Science (MFA) H-1525 Budapest, POB 49, Hungary
Lila R. Dahal
Affiliation:
Res. Inst. for Technical Physics & Materials Science (MFA) H-1525 Budapest, POB 49, Hungary
R. W. Collins
Affiliation:
Res. Inst. for Technical Physics & Materials Science (MFA) H-1525 Budapest, POB 49, Hungary
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Abstract

We have developed a prototype spectroscopic ellipsometer for imaging/mapping purposes requiring only one measurement cycle (one rotation period of a polarizer or analyzer) for the acquisition of a two-dimensional array of data points. Our new measurement technique serves as a novel form of imaging ellipsometry, using a divergent (uncollimated, diffuse) source system and a detection system consisting of an angle-of-incidence-sensitive pinhole camera. By incorporating broad-band sources and wavelength dispersion optics, the instrument provides continuous high-resolution spectra along a line image of the sample surface. As a result, information on multilayer photovoltaics stacks can be obtained over large areas (several dm2) at high speed. The technique can be expanded to even larger areas by scaling-up the optical geometry. The spatial resolution of the line image is limited by the minimum resolved-angle as determined by the detection system. Small-aperture polarizers (25 mm diameter) are incorporated into the instrument, which reduces its cost. Demonstration mapping measurements have been performed ex situ on a multilayer sample deposited on a polymer substrate, including an intentionally graded 80-350 nm thick hydrogenated amorphous silicon (a-Si:H) layer and an intended uniform 400-500 nm thick transparent conducting ZnO:Al layer, both on opaque silver. Alternative commercial instruments for ex situ SE mapping must translate the sample in two dimensions. Even a 15 x 15 cm2 sample requires > 200 measurements with cm-resolution and at least 15 min. By collecting ex situ data in parallel along one dimension through imaging, the divergent-beam system can measure with similar spatial resolution in < 2 min. In situ measurements on both roll-to-roll polymer and rigid glass will be possible in the future.

Type
Research Article
Copyright
Copyright © Materials Research Society 2011

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References

1. Patent pending, P0700366, PCT/HU2008/000058 Google Scholar
2. Juhasz, G., Horvath, Z., Major, C., Petrik, P., Polgar, O., and Fried, M., “Non-collimated beam ellipsometry”, Phys. Stat. Sol. (c) 5, 10811084 (2008).CrossRefGoogle Scholar
3. Major, C., Juhasz, G., Horvath, Z., Polgar, O., and Fried, M., “Wide angle beam ellipsometry for extremely large samples”, Phys. Stat. Sol. (c), 5, 10771080 (2008).CrossRefGoogle Scholar
4. Major, C., Juhasz, G., Petrik, P., Horvath, Z., Polgar, O., and Fried, M., “Application of wide angle beam spectroscopic ellipsometry for quality control in solar cell production”, Vacuum 84, 119122 (2009).CrossRefGoogle Scholar
5. Fried, M., Juhasz, G., Major, C., Petrik, P., Polgar, O., Horvath, Z., Nutsch, A., “Expanded beam (macro-imaging) ellipsometry”, Thin Solid Films 519, 27302736 (2011).CrossRefGoogle Scholar

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Application of a Dual-spectral-range, Divergent-beam Spectroscopic Ellipsometer for High-Speed Mapping of Large-area, Laterally-inhomogeneous, Photovoltaic Multilayers
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Application of a Dual-spectral-range, Divergent-beam Spectroscopic Ellipsometer for High-Speed Mapping of Large-area, Laterally-inhomogeneous, Photovoltaic Multilayers
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Application of a Dual-spectral-range, Divergent-beam Spectroscopic Ellipsometer for High-Speed Mapping of Large-area, Laterally-inhomogeneous, Photovoltaic Multilayers
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