Skip to main content Accessibility help
×
Home
Hostname: page-component-78bd46657c-vnkdd Total loading time: 0.16 Render date: 2021-05-07T17:47:39.400Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": false, "newCiteModal": false, "newCitedByModal": true }

Amorphous Diamond-Like Carbon Film Growth by KrF-and Arf-Excimer Laser Pld: Correlation with Plume Properties

Published online by Cambridge University Press:  21 February 2011

A. A. Puretzky
Affiliation:
institute of Spectroscopy, Troitsk, Russia
D. B. Geohegan
Affiliation:
Oak Ridge National Laboratory, Oak Ridge, TN
G. E. Jellison Jr.
Affiliation:
Oak Ridge National Laboratory, Oak Ridge, TN
M. M. Mcgibbon
Affiliation:
University of Glasgow, Glasgow, United Kingdom
Get access

Abstract

A comparative study of arF- and KrF-laser deposition of amorphous diamond-like carbon (DLC) films and relevant carbon plasmas has been performed. Spectroscopic ellipsometry and EELS analysis of the DLC films deposited on Si <100> and NaCl substrates were utilized to characterize the high quality arF- and KrF-laser deposited films (up to 84% of sp3 bonded carbon in 7 J/cm2 -ArF-laser DLC film). Gated ICCD imaging, luminescence and ion current probe diagnostics of the carbon plume have revealed quite different properties of carbon plasmas generated by arF- and KrF- lasers. KrF-laser (6.7 J/cm2) irradiation produces a less energetic carbon plasma containing larger amounts of C2 and probably larger clusters compared with arF-laser irradiation at the same energy fluence. We conclude that the more energetic and highly-atomized arF-laser carbon plasma results in the better diamond-like properties.

Type
Research Article
Copyright
Copyright © Materials Research Society 1995

Access options

Get access to the full version of this content by using one of the access options below.

References

1 Pappas, D. L., Saenger, K. L., Bruley, J., Krakov, W., Cuomo, J. J. and Collins, R. W., J. appl. Phys. 71, 5675 (1992).CrossRefGoogle Scholar
2 R.Xiong, , wang, Y. Y., Leppert, V., Chang, R. P. H., J. Mater. Res. 8, 2265 (1993).CrossRefGoogle Scholar
3 Geohegan, D. B., Thin Solid Films 220, 138 (1992).CrossRefGoogle Scholar
4 Geohegan, D. B., Appl. Phys. Lett. 60, 2732 (1992).CrossRefGoogle Scholar
5 Browning, N. D. and Pennycook, S. J., Microbeam analysis 2, 81 (1993).Google Scholar
6 Berger, S. D., McKenzie, D. R., Martin, P. J., Philosophical Magazine Letters 57, 285 (1988).CrossRefGoogle Scholar
7 Jellison, G. E. Jr. and Modine, F. A., appl. Optics 29, 959 (1990).CrossRefGoogle Scholar
8 Forouhi, A. R. and Bloomer, I., Phys. Rev. B 34, 7018 (1986).CrossRefGoogle Scholar
9 Jellison, G. E. Jr., Thin Solid Films 234, 416 (1993).CrossRefGoogle Scholar
10 Edwards, D. F. and Philipp, H. R., Handbook of Optical Constants of Solids, ed. by Palic, E. D., Academic Press, San-Diego, 1985, p.665 CrossRefGoogle Scholar

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Amorphous Diamond-Like Carbon Film Growth by KrF-and Arf-Excimer Laser Pld: Correlation with Plume Properties
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Amorphous Diamond-Like Carbon Film Growth by KrF-and Arf-Excimer Laser Pld: Correlation with Plume Properties
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Amorphous Diamond-Like Carbon Film Growth by KrF-and Arf-Excimer Laser Pld: Correlation with Plume Properties
Available formats
×
×

Reply to: Submit a response


Your details


Conflicting interests

Do you have any conflicting interests? *