Skip to main content Accessibility help
×
Home
Hostname: page-component-cf9d5c678-cnwzk Total loading time: 0.262 Render date: 2021-08-04T10:39:25.017Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": true, "newCiteModal": false, "newCitedByModal": true, "newEcommerce": true, "newUsageEvents": true }

Amorphous and Microcrystalline Silicon Based Solar Cells and Modules on Textured Zinc Oxide Coated Glass Substrates

Published online by Cambridge University Press:  01 February 2011

Bernd Rech
Affiliation:
Institute of Photovoltaics - IPV, Forschungszentrum Jülich GmbH, D-52425 Jülich, Germany
Joachim Müller
Affiliation:
Institute of Photovoltaics - IPV, Forschungszentrum Jülich GmbH, D-52425 Jülich, Germany
Tobias Repmann
Affiliation:
Institute of Photovoltaics - IPV, Forschungszentrum Jülich GmbH, D-52425 Jülich, Germany
Oliver Kluth
Affiliation:
Institute of Photovoltaics - IPV, Forschungszentrum Jülich GmbH, D-52425 Jülich, Germany
Tobias Roschek
Affiliation:
Institute of Photovoltaics - IPV, Forschungszentrum Jülich GmbH, D-52425 Jülich, Germany
Jürgen Hüpkes
Affiliation:
Institute of Photovoltaics - IPV, Forschungszentrum Jülich GmbH, D-52425 Jülich, Germany
Helmut Stiebig
Affiliation:
Institute of Photovoltaics - IPV, Forschungszentrum Jülich GmbH, D-52425 Jülich, Germany
Wolfgang Appenzeller
Affiliation:
Institute of Photovoltaics - IPV, Forschungszentrum Jülich GmbH, D-52425 Jülich, Germany
Get access

Abstract

This paper addresses scientific and technological efforts to develop highly efficient silicon thin film solar modules on glass substrates. We present a comprehensive study of μc-Si:H p-i-n single junction and a-Si:H/μc-Si:H stacked solar cells prepared by plasma-enhanced chemical vapour deposition (PECVD) at 13.56 MHz excitation frequency. In the first step cell development was performed in a small area PECVD reactor showing the relationship between deposition process and resulting solar cell performance. Subsequent up-scaling to a substrate area of 30×30 cm2 confirmed the scalability to large area reactors. Moreover, we developed textured ZnO:Al films by sputtering and post deposition wet chemical etching as front contact TCO-material with excellent light scattering properties. A-Si:H/μc-Si:H tandem cells developed on this textured ZnO yielded stable efficiencies up to 11.2 % for a cell area of 1 cm2. First solar modules were prepared in our recently installed process technology, which includes PECVD, sputtering, texture etching and laser scribing on substrate sizes up to 30x30 cm2. Initial module efficiencies of 10.8 % and 10.1 % were achieved for aperture areas of 64 cm2 and 676 cm2, respectively.

Type
Research Article
Copyright
Copyright © Materials Research Society 2003

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Meier, J., Vallat-Sauvain, E., Dubail, S., Kroll, U., Dubail, J., Golay, S., Feitknecht, L., Torres, P., Faÿ, S., Fischer, D., Shah, A., Sol. Energy Mater. Sol. Cells 66, 73 (2001), and references therein.CrossRefGoogle Scholar
2. Saito, K., Sano, M., Matuda, K., Kondo, T., Nishimoto, T., Ogawa, K., Kajita, I., Proc. 2nd World Conference PVSEC, Vienna, Austria, 1998, p. 351.Google Scholar
3. Vetterl, O., Finger, F., Carius, R., Hapke, P., Houben, L., Kluth, O., Lambertz, A., Mück, A., Rech, B., Wagner, H., Sol. Energy Mater. Sol. Cells 62, 97 (2000).CrossRefGoogle Scholar
4. Rech, B., Kluth, O., Repmann, T., Roschek, T., Springer, J., Müller, J., Finger, F., Stiebig, H. and Wagner, H., Sol. Energy Mater. Sol. Cells 74, 439 (2002).CrossRefGoogle Scholar
5. Yamamoto, K., Yoshimi, M., Tawada, Y., Fukuda, S., Sawada, T., Meguro, T., Takata, H., Suezaki, T., Koi, Y., Hayashi, K., Suzuki, T., Ichikawa, M., Nakajima, A., Sol. Energy Mater. Sol. Cells 74, 449 (2002).CrossRefGoogle Scholar
6. Hüpkes, J., Rech, B., Kluth, O., Müller, J., Siekmann, H., Agashe, C., Bochem, H.P., Wuttig, M., this conference.Google Scholar
7. Löffl, A., Wieder, S., Rech, B., Kluth, O., Beneking, C., Wagner, H., Proc. 14h EC-PVSEC, Barcelona (1997), p. 2089 Google Scholar
8. Kluth, O., Rech, B., Houben, L., Wieder, S., Schöpe, G., Beneking, C., Wagner, H., Löffl, A., Schock, H.W., Thin Solid Films 351, 247 (1999)CrossRefGoogle Scholar
9. Faÿ, S., Dubail, S., Kroll, U., Meier, J., Ziegler, Y., Shah, A., Proc. 16th EC-PVSEC, Glasgow, U.K. (2000), p.362.Google Scholar
10. Groenen, R., Löffler, J., Sommeling, P. M., Linden, J. L., Hamers, E. A. G., Schropp, R.E.I. and Sanden, M. C. M. van de, Thin Solid Films 392, 226 (2001).CrossRefGoogle Scholar
11. Lechner, P., Geyer, R., Schade, H., Rech, B. and Müller, J., Proc. 28th IEEE Photovoltaic Specialists Conference, Anchorage, USA (2000) p. 861.Google Scholar
12. Carius, R., private communication.Google Scholar
13. Müller, J., Schöpe, G., Kluth, O., Rech, B., Ruske, M., Trube, J., Szyszka, B., Jiang, X. and Bräuer, G., Thin Solid Films 392, 327(2001).CrossRefGoogle Scholar
14. Szyszka, B., Thin Solid Films 351, 164 (1999).CrossRefGoogle Scholar
15. Guo, L., Kondo, M., Fukawa, M., Saitoh, K., Matsuda, A., Jpn. J. Appl. Phys. 37, L1116 (1998).CrossRefGoogle Scholar
16. Rech, B., Roschek, T., Müller, J., Wieder, S., Wagner, H., Solar Energy Materials & Solar Cells 66 (2001) 267273 CrossRefGoogle Scholar
17. Roschek, T., Repmann, T., Müller, J., Rech, B., Wagner, H., J. Vac. Sci. Technol. A20 (2), 492 (2002)CrossRefGoogle Scholar
18 Roschek, T., Repmann, T., Kluth, O., Müller, J., Rech, B., Wagner, H., Mat. Res. Soc. Symp. Proc. 715 (2002) A26.5 CrossRefGoogle Scholar
19. Rech, B., Roschek, T., Repmann, T., Müller, J., Schmitz, R. and Appenzeller, W., Thin Solid Films 427, 157 (2003).CrossRefGoogle Scholar
20. Repmann, T., Appenzeller, W., Roschek, T., Rech, B. and Wagner, H., Proc.28th IEEE Photovoltaic Specialists Conference, Anchorage, USA (2000) p. 912.Google Scholar
21. Klein, S., Finger, F., Carius, R., Dylla, T., Rech, B., Grimm, M., Houben, L. and Stutzmann, M., Thin Solid Films (2003), available online.Google Scholar
22. Repmann, T., Appenzeller, W., Roschek, T., Rech, B., Kluth, O., Müller, J., Psyk, W., Geyer, R., Lechner, P., Proc. 7th European Photovoltaic Solar Energy Conf., edited by McNelis, B., Palz, W., Ossenbrink, H. A., Helm, P. (WIP-Munich and ETA-Florence), Munich, 2001, p. 2836 Google Scholar

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Amorphous and Microcrystalline Silicon Based Solar Cells and Modules on Textured Zinc Oxide Coated Glass Substrates
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Amorphous and Microcrystalline Silicon Based Solar Cells and Modules on Textured Zinc Oxide Coated Glass Substrates
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Amorphous and Microcrystalline Silicon Based Solar Cells and Modules on Textured Zinc Oxide Coated Glass Substrates
Available formats
×
×

Reply to: Submit a response

Please enter your response.

Your details

Please enter a valid email address.

Conflicting interests

Do you have any conflicting interests? *