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3D Photonic Crystals Fabricated by Micromanipulation Technique

Published online by Cambridge University Press:  01 February 2011

Kanna Aoki ,
Hideki T. Miyazaki ,
Hideki Hirayama ,
Kyoji Inoshita ,
Toshihiko Baba ,
Norio Shinya  and
Yoshinobu Aoyagi
Kanna Aoki
Affiliation:
Semiconductors Laboratory, RIKEN, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan
Hideki T. Miyazaki
Affiliation:
National Institute for Material Science, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047, Japan
Hideki Hirayama
Affiliation:
Semiconductors Laboratory, RIKEN, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan
Kyoji Inoshita
Affiliation:
Yokohama Natl. Univ., 79-5 Tokiwadai, Hodogaya-ku, Yokohama, Kanagawa 240-8501, Japan
Toshihiko Baba
Affiliation:
Yokohama Natl. Univ., 79-5 Tokiwadai, Hodogaya-ku, Yokohama, Kanagawa 240-8501, Japan
Norio Shinya
Affiliation:
National Institute for Material Science, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047, Japan
Yoshinobu Aoyagi
Affiliation:
Semiconductors Laboratory, RIKEN, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan
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Abstract

Three-dimensional (3D) photonic crystals with one to four layers of woodpile structures have been fabricated by stacking two-dimensional (2D) photonic plates by micromanipulation. First, air-bridge photonic plates were fabricated as unit structures using conventional IC processing techniques. Then, the 2D photonic plates were stacked using a micromanipulation system. To obtain lattices with precise periodicity, microspheres were inserted into the round openings which were prepared in the frame of the plates. Since neighboring plates have pore openings at the same position, plates were laminated at the proper position automatically. Consequently, positioning error was kept within 50 nm. Optical characteristics of the crystals were evaluated by their reflectance and transmittance at wavenumber between 700 and 7000 cm-1. The formed photonic crystals were expected to have a photonic band gap at around 3030 cm-1. As the number of layers was increased, the reflectance at around 3030 cm-1 increased to 60 %, and the transmittance at the same wavelength region decreased to 30 %.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 722: Symposia K/L – Materials and Devices for Optoelectronics and Photonics – Photonic Crystals-From Materials to Devices , 2002 , L7.2
Copyright
Copyright © Materials Research Society 2002

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