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Piezoelectric PZT MEMS technologies for small-scale robotics and RF applications

Published online by Cambridge University Press:  12 November 2012

Jeffrey S. Pulskamp ,
Ronald G. Polcawich ,
Ryan Q. Rudy ,
Sarah S. Bedair ,
Robert M. Proie ,
Tony Ivanov  and
Gabriel L. Smith
Jeffrey S. Pulskamp
Affiliation:
US Army Research Laboratory, Adelphi, MD; Jeffrey.s.pulskamp.civ@mail.mil
Ronald G. Polcawich
Affiliation:
US Army Research Laboratory, Adelphi, MD; Ronald.g.polcawich@us.army.mil
Ryan Q. Rudy
Affiliation:
University of Maryland, College Park; ryanrudy@umd.edu
Sarah S. Bedair
Affiliation:
US Army Research Laboratory, Adelphi, MD; sarah.s.bedair.civ@mail.mil
Robert M. Proie
Affiliation:
US Army Research Laboratory, Adelphi, MD; robert.m.proie.civ@mail.mil
Tony Ivanov
Affiliation:
US Army Research Laboratory, Adelphi, MD
Gabriel L. Smith
Affiliation:
US Army Research Laboratory, Adelphi, MD; Gabriel.l.smith.civ@mail.mil
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Abstract

Thin-film piezoelectric lead zirconate titanate (PZT) is one of the most efficient electromechanical coupling transducer materials currently available for microelectromechanical systems (MEMS). This article reviews piezoelectric MEMS (piezo MEMS) technologies using PZT thin films in radio frequency (RF) devices for communications and radar applications and in the emerging field of millimeter-scale robotics. The electromechanical material properties of thin-film PZT uniquely enable insect-inspired and insect-scale autonomous robots. Recent progress on large force and displacement actuators for robotic leg joints, compact and high torque ultrasonic motors, and bioinspired millimeter-scale flapping wing platforms will be presented. The use of thin-film PZT to achieve high performance and low-voltage RF MEMS switches, ultralow power consumption nanomechanical logic circuits, and high coupling and low loss resonators, filters, and transformers are also reviewed.

Keywords

Microelectromechanical (MEMS)piezoelectricferroelectricdevices
Type
Research Article
Information
MRS Bulletin , Volume 37 , Issue 11: Thin-film piezoelectric MEMS , November 2012 , pp. 1062 - 1070
Copyright
Copyright © Materials Research Society 2012

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