Micro-Optical Devices Dry Etched into Diamond

Jennifer Burris

doi:10.1557/mrs2002.6

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Micro-Optical Devices Dry Etched into Diamond

Published online by Cambridge University Press: 31 January 2011

Jennifer Burris

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Type: Research/Researchers
Information: MRS Bulletin , Volume 27 , Issue 1: Mechanical Properties in Small Dimensions , January 2002 , pp. 6

DOI: https://doi.org/10.1557/mrs2002.6 [Opens in a new window]
Copyright: Copyright © Materials Research Society 2002

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Micro-Optical Devices Dry Etched into Diamond

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